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Go Higashihara

Mitsubishi

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Publication

Featured researches published by Go Higashihara.

Archive | 2008

COMPOSITION FOR FORMING BASE FILM FOR LITHOGRAPHY AND METHOD FOR FORMING MULTILAYER RESIST PATTERN

Dai Oguro; Go Higashihara; Seiji Kita; Mitsuharu Kitamura; Masashi Ogiwara

Archive | 2012

Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method

Masatoshi Echigo; Go Higashihara; Naoya Uchiyama

Archive | 2012

Resin having fluorene structure and underlayer film-forming material for lithography

Go Higashihara; Naoya Uchiyama; Masatoshi Echigo

Archive | 2014

CYANATE ESTER COMPOUND, CURABLE RESIN COMPOSITION CONTAINING SAID COMPOUND, AND CURED PRODUCT OF SAID COMPOSITION

Masayuki Katagiri; Go Higashihara; Kenji Arii; Yuuichi Sugano; Makoto Tsubuku

Archive | 2013

NAPHTHALENE-FORMALDEHYDE RESIN, NAPHTHALENE-FORMALDEHYDE RESIN WITH BONDS FORMED BY DEACETALIZATION, AND MODIFIED NAPHTHALENE-FORMALDEHYDE RESIN

Naoya Uchiyama; Go Higashihara; Masatoshi Echigo

Archive | 2013

ACIDIFIED MONO ALKYL NAPHTHALENE FORMALDEHYDE RESIN

Naoya Uchiyama; Go Higashihara; Masatoshi Echigo

Archive | 2012

PHENOLIC RESIN AND MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY

Naoya Uchiyama; Go Higashihara; Masatoshi Echigo

Archive | 2011

AROMATIC HYDROCARBON RESIN, UNDERLAYER FILM FORMING COMPOSITION FOR LITHOGRAPHY, AND METHOD FOR FORMING MULTILAYER RESIST PATTERN

Go Higashihara; Naoya Uchiyama; Masatoshi Echigo

Archive | 2017

Underlayer film-forming composition for lithography, underlayer film for lithography, and pattern forming method

Kana Okada; Takashi Makinoshima; Masatoshi Echigo; Go Higashihara; Atsushi Okoshi

Archive | 2015

MATERIAL FOR FORMING UNDERLAYER FILM LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY AND PATTERN FORMING METHOD

Masatoshi Echigo; Go Higashihara; Naoya Uchiyama

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Collaboration

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Masatoshi Echigo

Mitsubishi

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Naoya Uchiyama

Mitsubishi

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Atsushi Okoshi

Mitsubishi

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Kana Okada

Mitsubishi

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Takashi Makinoshima

Mitsubishi

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Dai Oguro

Mitsubishi

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Masashi Ogiwara

Mitsubishi

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Mitsuharu Kitamura

Mitsubishi

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Seiji Kita

Mitsubishi

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Kenji Arii

Mitsubishi

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