Naoya Uchiyama
Mitsubishi
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Publication
Featured researches published by Naoya Uchiyama.
Proceedings of SPIE | 2013
Takumi Toida; Akihiro Suzuki; Naoya Uchiyama; Takashi Makinoshima; Masaaki Takasuka; Takashi Sato; Masatoshi Echigo
In this paper, we report the development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL. The new xanthendiol derivatives were easily synthesized by the condensation of aldehydes and dihydroxyaromatic compounds. We found 13,13’-biphenyl-bis(13H-benzoxanthen-2,11-diol) was showed the good applicability to the raw material for the resist for EB/EUVL. The EB patterning result showed the resist containing xanthendiol derivative could resolve the 20 nm half-pitch pattern, and 15 nm half-pitch patterns were partially resolved.
Archive | 2012
Masatoshi Echigo; Go Higashihara; Naoya Uchiyama
Archive | 2012
Go Higashihara; Naoya Uchiyama; Masatoshi Echigo
Archive | 2013
Naoya Uchiyama; Go Higashihara; Masatoshi Echigo
Archive | 2013
Naoya Uchiyama; Go Higashihara; Masatoshi Echigo
Archive | 2012
Naoya Uchiyama; Go Higashihara; Masatoshi Echigo
Archive | 2011
Go Higashihara; Naoya Uchiyama; Masatoshi Echigo
Archive | 2015
Masatoshi Echigo; Go Higashihara; Naoya Uchiyama
Archive | 2014
Masatoshi Echigo; Takashi Makinoshima; Naoya Uchiyama
Archive | 2012
Go Higashihara; Naoya Uchiyama; Masatoshi Echigo
