Grant Kenji Larsen | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Grant Kenji Larsen is active.

Explore More

Publication

Featured researches published by Grant Kenji Larsen.

Archive | 1998

Electrostatic wafer clamp having low particulate contamination of wafers

Grant Kenji Larsen

Archive | 2004

Methods and apparatus for high speed object handling

Grant Kenji Larsen

Archive | 2002

In situ ion beam incidence angle and beam divergence monitor

Grant Kenji Larsen; Ashwin Purohit; Robert Andrew Poitras; Morgan D. Evans; Damian Brennan

Archive | 1999

Active electrostatic seal and electrostatic vacuum pump

Grant Kenji Larsen

Archive | 2002

Ion beam incidence angle and beam divergence monitor

Grant Kenji Larsen; Ashwin Purohit; Robert Andrew Poitras; Morgan D. Evans; Damian Brennan

Archive | 2000

SURFACE STRUCTURE AND METHOD OF MAKING, AND ELECTROSTATIC WAFER CLAMP INCORPORATING SURFACE STRUCTURE

Grant Kenji Larsen

Archive | 1999

Electrostatic wafer clamp having electrostatic seal for retaining gas

Grant Kenji Larsen

Archive | 2004

Electrode configuration for retaining cooling gas on electrostatic wafer clamp

Grant Kenji Larsen

Archive | 2002

Method of measuring ion beam angles

Grant Kenji Larsen

Archive | 2004

Mehtod of measuring ion beam angles

Grant Kenji Larsen

Explore More

Collaboration

Dive into the Grant Kenji Larsen's collaboration.

Top Co-Authors

Ashwin Purohit

Varian Semiconductor

View shared research outputs

Top Co-Authors

Damian Brennan

Varian Semiconductor

View shared research outputs

Top Co-Authors

Morgan D. Evans

Varian Semiconductor

View shared research outputs

Top Co-Authors

Robert Andrew Poitras

Varian Semiconductor

View shared research outputs

Top Co-Authors

Kevin G. Rhoads

Massachusetts Institute of Technology

View shared research outputs

Explore More