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Dive into the research topics where Morgan D. Evans is active.

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Featured researches published by Morgan D. Evans.


ieee international conference on solid state and integrated circuit technology | 2016

Device and process design of leading edge transistors for performance and yield

Hans-Joachim L. Gossmann; Steven Sherman; Morgan D. Evans; Kevin Anglin

The three-dimensional (3D) nature and continued dimensional scaling of Fin-, Nanowire-, and Gate-All-Around-FETs raise a host of unique challenges to device and process design that impact both performance and yield. We highlight selected technology challenges and solutions, specifically doping requirements for isolation, SD/E, and contact, as well as a new advanced planarization technique.


Archive | 2002

In situ ion beam incidence angle and beam divergence monitor

Grant Kenji Larsen; Ashwin Purohit; Robert Andrew Poitras; Morgan D. Evans; Damian Brennan


Archive | 2005

Technique for high-efficiency ion implantation

Morgan D. Evans; Douglas Thomas Fielder; Gregg A. Norris


Archive | 2005

Technique for uniformity tuning in an ion implanter system

Joseph C. Olson; Jonathan Gerald England; Morgan D. Evans; Douglas Thomas Fielder; Gregg A. Norris; Shengwu Chang; Damian Brennan; William G. Callahan


Archive | 2002

Ion beam incidence angle and beam divergence monitor

Grant Kenji Larsen; Ashwin Purohit; Robert Andrew Poitras; Morgan D. Evans; Damian Brennan


Archive | 2007

Magnetic monitoring of a faraday cup for an ion implanter

Joseph P. Dzengeleski; Morgan D. Evans; Jay T. Scheuer; Ashwin Shetty; Kenneth Swenson


Archive | 2012

Method of etching a workpiece

Ludovic Godet; Morgan D. Evans; Chi-Chun Chen


Archive | 2007

ION BEAM CURRENT UNIFORMITY MONITOR, ION IMPLANTER AND RELATED METHOD

William G. Callahan; Morgan D. Evans; George M. Gammel; Norman E. Hussey; Gregg A. Norris; Joseph C. Olson


Archive | 2007

TECHNIQUES FOR REMOVING MOLECULAR FRAGMENTS FROM AN ION IMPLANTER

Christopher R. Hatem; Jay T. Scheuer; Russell J. Low; Morgan D. Evans; Jonathan Gerald England


Archive | 2012

HETEROEPITAXIAL GROWTH USING ION IMPLANTATION

Morgan D. Evans; Chi-Chun Chen; Cheng-Huang Kuo

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