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Featured researches published by Grzegorz Kaganowicz.


IEEE Transactions on Electron Devices | 1990

Low-cost process for fabricating polysilicon transistors

Alfred C. Ipri; Grzegorz Kaganowicz

A process for the fabrication of p-channel polysilicon MOS transistors is described. The process is compatible with the use of low-temperature glass substrates and replaces the use of ion implantation for the source/drain doping with in situ doped polysilicon. MOS transistors made with this process exhibit an on/off current ratio of 2.5*10/sup 5/, a mobility of 16 cm/sup 2//V-s, and a subthreshold slope of 1.3 V/decade. >


Archive | 1984

Low temperature method of deposition silicon dioxide

Grzegorz Kaganowicz; John W. Robinson


Archive | 1986

Method of forming a dielectric film and semiconductor device including said film

Grzegorz Kaganowicz; Alfred C. Ipri; Richard S. Crandall


Archive | 1984

Low temperature growth of silicon dioxide on silicon

Grzegorz Kaganowicz; John W. Robinson; John H. Thomas


Archive | 1986

Silicon oxynitride passivated semiconductor body and method of making same

Grzegorz Kaganowicz; Ronald E. Enstrom; John W. Robinson


Archive | 1981

Adherent perfluorinated layers

Grzegorz Kaganowicz; John W. Robinson


Archive | 1986

Apparatus for making a plasma coating

Grzegorz Kaganowicz


Archive | 1977

Video disc with a dielectric layer formed from acetylene and nitrogen

Grzegorz Kaganowicz; John W. Robinson; Hirotsugu Yasuda


Archive | 1981

Method for preparing an abrasive lapping disc

Grzegorz Kaganowicz; John W. Robinson


Archive | 1986

Preparation of a surface for deposition of a passinating layer

Grzegorz Kaganowicz; Ronald E. Enstrom; John W. Robinson

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