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Gyu-hwan Kwag

Samsung

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Publication

Featured researches published by Gyu-hwan Kwag.

Archive | 2009

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

Ki-sang Kim; Gyu-chan Jeoung; Gyu-hwan Kwag

Archive | 2001

Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device

Gyu-hwan Kwag; Hyun Joo Han; Ki-heum Nam

Archive | 1997

Methods for performing plasma etching operations on microelectronic structures

Whikun Yi; Dai-sik Uiwang Moon; Sung-Kyeong Kim; Kyunghoon Kim; Gyu-hwan Kwag

Archive | 2001

Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method

Gyu-hwan Kwag; Se-Jong Ko; Kyung-Seuk Hwang; Jun-ing Gil; Sang-o Park; Dae-Hoon Kim; Sang-Moon Chon; Ho-Kyoon Chung

Archive | 1999

Apparatus for wafer treatment for the manufacture of semiconductor devices

Gyu-hwan Kwag; Kyung-Seuk Hwang

Archive | 1999

Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof

Kyung-Seuk Hwang; Gyu-hwan Kwag; Young-hwan Yun

Archive | 1999

Wet-etching facility for manufacturing semiconductor devices

Seung-kun Lee; Jae-hyung Jung; Young-hwan Yun; Gyu-hwan Kwag

Archive | 1999

Sputtering apparatus having a target backing plate equipped with a cooling line and sputtering method using the same

Jung-suk Oh; Yoon-sei Park; Gyu-hwan Kwag

Archive | 2001

Wafer dryer comprising revolving spray nozzle and method for drying wafers using the same

Yong-joon Cho; Gyu-hwan Kwag

Archive | 1999

Semiconductor device, especially a multilayer circuit structure, production process

Gyu-hwan Kwag; Se-Jong Ko; Kyung-Seuk Hwang; Jun-ing Gil; Sang-o Park; Dae-Hoon Kim; Sang-Moon Chun; Ho-Gyun Jung

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Kyung-Seuk Hwang

Samsung

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Dae-Hoon Kim

Samsung

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Gyu-chan Jeoung

Samsung

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Ki-sang Kim

Samsung

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Sang-o Park

Samsung

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Se-Jong Ko

Samsung

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Young-hwan Yun

Samsung

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Ho-Gyun Jung

Samsung

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Seung-kun Lee

Samsung

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Yong-joon Cho

Samsung

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