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Dive into the research topics where Seung-kun Lee is active.

Publication


Featured researches published by Seung-kun Lee.


Archive | 1999

Wet-etching facility for manufacturing semiconductor devices

Seung-kun Lee; Jae-hyung Jung; Young-hwan Yun; Gyu-hwan Kwag


Archive | 1999

Apparatus and methods for rerecirculating etching solution during semiconductor wafer processing

Seung-kun Lee


Archive | 1998

Wafer transfer system of semiconductor fabricating equipment using a serial number detecting device

Kwang-hee Shin; Seung-kun Lee


Archive | 2001

Semiconductor wafer cleaning apparatus and method of using the same

Yong-joon Cho; Seung-kun Lee; Young-hwan Yun; Gyu-hwan Kwag


Archive | 1999

Wafer transfer method using a serial number detecting device in semiconductor fabricating equipment

Kwang-hee Shin; Seung-kun Lee


Archive | 2006

Wafer guide and semiconductor wafer drying apparatus using the same

Jong-jae Lee; Seung-kun Lee; Man-young Lee; Jae-Heung Jung; Yang-Ryul Park; Kyun-Tak Baek; Sung-Kook Choi


Archive | 2006

Substrate dryer and a drying method

Chang-Hyeon Nam; Seung-kun Lee


Archive | 2009

Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same

Chang-Hyeon Nam; Seung-kun Lee; Joong-Sup Choi; Changmoon Ahn; Wi-Seob Kang


Archive | 2004

Wafer cleaning apparatus and method of anticipating malfunction of pump

Jing-min Kim; Man-young Lee; Seung-kun Lee


Archive | 2006

Method of and apparatus for heating liquid used in the manufacturing of semiconductor devices, and method of processing substrates with heated liquid

Duk-Min Ahn; Seung-kun Lee; Chang-Hyeon Nam

Collaboration


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