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H. Peter W. Hey

Applied Materials

Publication

Featured researches published by H. Peter W. Hey.

Archive | 1995

Method for in-situ cleaning of native oxide from silicon surfaces

H. Peter W. Hey; David K. Carlson

Archive | 1996

Semiconductor wafer process chamber with susceptor back coating

Roger N. Anderson; H. Peter W. Hey; Israel Beinglass; Mahalingam Venkatesan

Archive | 1993

Low temperature etching in cold-wall CVD systems

David K. Carlson; H. Peter W. Hey; James C Hann

Archive | 2001

Dynamic pulse plating for high aspect ratio features

H. Peter W. Hey; Yezdi Dordi

Archive | 1995

Silicon nitride deposition

H. Peter W. Hey; David W. Carlson

Archive | 2003

Flow diffuser to be used in electro-chemical plating system

Yezdi Dordi; Joseph J. Stevens; H. Peter W. Hey; Donald J. K. Olgado

Archive | 2001

Segmenting of processing system into wet and dry areas

H. Peter W. Hey; Michael Sugarman; Mark Denome

Archive | 2000

Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics

Suketu A. Parikh; Mehul Naik; Samuel Broydo; H. Peter W. Hey

Archive | 2001

Reverse voltage bias for electro-chemical plating system and method

H. Peter W. Hey; Yezdi Dordi

Archive | 2000

Flow diffuser to be used in electro-chemical plating system and method

Yezdi Dordi; Joseph J. Stevens; H. Peter W. Hey; Donald J. K. Olgado

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