Hans-Joachim Barth
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Publication
Featured researches published by Hans-Joachim Barth.
Multilevel interconnect technology. Conference | 1997
Hans-Joachim Barth; J. Bierner; Hans Helneder; Werner K. Robl; K. Schober; Manfred Schneegans
The benefits of different advanced PVD methods for Ti/TiN films, collimated, longthrow and ionized PVD, are compared to conventional or standard magnetron sputtering with respect to future requirements. Special attention is given to integration aspects in combination with W- plugs and hot Al-fill techniques for contact applications. Besides basic film properties and step coverage data, electrical results for contacts are reported. The dependence of the contact resistance on the bottom Ti thickness is explained, and a new spiking model for Al-filled contacts is proposed. Finally specific manufacturing issues like throughput, target life time and defect densities will be addressed also.
Archive | 2005
Hans-Joachim Barth; Erdem Kaltalioglu; Mark Hoinkis; Gerald Friese; Pak Leung
Archive | 2016
Hans-Joachim Barth; Reinhard Mahnkopf; Wolfgang Molzer; Harald Gossner; Christian Mueller
Archive | 2015
Hans-Joachim Barth; Reinhard Mahnkopf; Sven Albers; Thorsten Meyer
Archive | 2014
Michael Skinner; Sven Albers; Harald Gossner; Peter Baumgartner; Hans-Joachim Barth
Archive | 2017
Thorsten Meyer; Gerald Ofner; Bernd Waidhas; Hans-Joachim Barth; Sven Albers; Reinhard Golly; Philipp Riess; Bernd Ebersberger
Archive | 2017
Hans-Joachim Barth; Reinhard Mahnkopf; Sven Albers; Thorsten Meyer
Archive | 2016
Reinhard Mahnkopf; Wolfgang Molzer; Bernd Memmler; Edmund Goetz; Hans-Joachim Barth; Sven Albers; Thorsten Meyer
Archive | 2016
Reinhard Mahnkopf; Wolfgang Molzer; Bernd Memmler; Edmund Goetz; Hans-Joachim Barth; Sven Albers; Thorsten Meyer
Archive | 2015
Hans-Joachim Barth; Reinhard Mahnkopf; Sven Albers; Thorsten Meyer
