Harald Volkenandt

Method of producing a diffractive optical element and diffractive optical element produced by such a method

Verfahren zur Herstellung eines diffraktiven optischen Elements, nach einem derartigen Verfahren hergestelltes diffraktives optisches Element, Beleuchtungsoptik mit einem derartigen diffratkiven optischen Element, Mikrolithografie-Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik, Verfahren zum Herstellen eines mikroelektronischen Bauelements unter Verwendung einer derartigen Projektionsbelichtungsanlage sowie mit einem solchen Verfahren hergestelltes Bauelement

Apparatus and process for spatially resolved refractive power determination

Device and procedure for a space resolved determination of the refractive power of an optical element

Process and apparatus for molding optical lenses

Method for manufacturing a diffractive optical element and diffractive optical element manufactured according to a method of this type

Verfahren zur Herstellung eines diffraktiven optischen Elements sowie nach einem derartigen Verfahren hergestelltes diffraktives optisches Element

A process for producing a diffractive optical element, produced according to such a method, diffractive optical element, illumination optics, micro lithography projection exposure system manufactured with such diffratkiven optical element having such an illumination optical system, method for manufacturing a microelectronic device using such a projection exposure apparatus and such a method module

Molding optical lenses out of a hardenable plastic, comprises locating two mould sections so their surfaces are spaced apart, and filling the intermediate space with plastic

Method and device for molding optical lenses