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Harald Volkenandt

Carl Zeiss AG

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Publication

Featured researches published by Harald Volkenandt.

Archive | 2008

Method of producing a diffractive optical element and diffractive optical element produced by such a method

Harald Volkenandt; Gundula Weiss

Archive | 2007

Verfahren zur Herstellung eines diffraktiven optischen Elements, nach einem derartigen Verfahren hergestelltes diffraktives optisches Element, Beleuchtungsoptik mit einem derartigen diffratkiven optischen Element, Mikrolithografie-Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik, Verfahren zum Herstellen eines mikroelektronischen Bauelements unter Verwendung einer derartigen Projektionsbelichtungsanlage sowie mit einem solchen Verfahren hergestelltes Bauelement

Harald Volkenandt; Gundula Weiss

Archive | 2001

Apparatus and process for spatially resolved refractive power determination

Harald Volkenandt; Bruno Neuhaus

Archive | 2001

Device and procedure for a space resolved determination of the refractive power of an optical element

Bruno Neuhaus; Harald Volkenandt

Archive | 2005

Process and apparatus for molding optical lenses

Harald Volkenandt

Archive | 2008

Method for manufacturing a diffractive optical element and diffractive optical element manufactured according to a method of this type

Harald Volkenandt; Gundula Weiss

Archive | 2008

Verfahren zur Herstellung eines diffraktiven optischen Elements sowie nach einem derartigen Verfahren hergestelltes diffraktives optisches Element

Harald Volkenandt; Gundula Weiss

Archive | 2007

A process for producing a diffractive optical element, produced according to such a method, diffractive optical element, illumination optics, micro lithography projection exposure system manufactured with such diffratkiven optical element having such an illumination optical system, method for manufacturing a microelectronic device using such a projection exposure apparatus and such a method module

Harald Volkenandt; Gundula Weiss

Archive | 2004

Molding optical lenses out of a hardenable plastic, comprises locating two mould sections so their surfaces are spaced apart, and filling the intermediate space with plastic

Harald Volkenandt

Archive | 2003

Method and device for molding optical lenses

Harald Volkenandt

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Collaboration

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Bruno Neuhaus

Carl Zeiss AG

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Gundula Weiss

Carl Zeiss AG

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