Haruyoshi Yamakawa
Kurita Water Industries Ltd.
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Publication
Featured researches published by Haruyoshi Yamakawa.
Solid State Phenomena | 2012
Tatsuo Nagai; Haruyoshi Yamakawa; Minoru Uchida; Toru Otsu; Norihito Ikemiya; Hiroshi Morita
It is known that resist removal capability of SPM gradually deteriorates during the stripping process. The deterioration is theoretically explained to be the decrease in the concentration of sulfuric acid. On the contrary, in the case of electrolyzed sulfuric acid method, both concentrations of sulfuric acid and of peroxodisulfuric acid produced by electrolysis are kept constant, so that the resist removal capability is maintained for a long term even without addition of hydrogen peroxide. It is proved that resist patterned on φ300mm wafers and implanted at 1E14 atoms/cm2 can be removed using electrolyzed sulfuric acid solution without ashing process.
Archive | 2005
Norito Ikemiya; Hideki Kobayashi; Hiroshi Morita; Tatsuo Nagai; Haruyoshi Yamakawa; 秀樹 小林; 晴義 山川; 博志 森田; 達夫 永井; 範人 池宮
Archive | 2005
Tatsuo Nagai; Norihito Ikemiya; Haruyoshi Yamakawa; Hideki Kobayashi; Hiroshi Morita
Archive | 2006
Norito Ikemiya; Tatsuo Nagai; Haruyoshi Yamakawa; 晴義 山川; 達夫 永井; 範人 池宮
Archive | 2007
Tatsuo Nagai; Toru Otsu; Minoru Uchida; Haruyoshi Yamakawa; 内田 稔; 徹 大津; 晴義 山川; 達夫 永井
Archive | 2011
Haruyoshi Yamakawa; 晴義 山川
Archive | 2011
Haruyoshi Yamakawa; Hiroto Tokoshima
Archive | 2010
Haruyoshi Yamakawa; Minoru Uchida; Toru Otsu
Archive | 2012
Tatsuo Nagai; Haruyoshi Yamakawa
Archive | 2015
内田 稔; Minoru Uchida; 友野 佐々木; Yuuya Sasaki; 晴義 山川; Haruyoshi Yamakawa
