Hassane Oulachgar

Noise-equivalent power characterization of an uncooled microbolometer-based THz imaging camera

A THz camera based on an uncooled microbolometer 160X120 pixel array with nominal pitch of 52 μm has been developed at INO and initial transmission and reflection images showed promise. In the present paper, the characterization of both standard infrared and THz-optimized uncooled microbolometer pixel arrays are presented at both infrared and THz wavelengths. Measurements in the THz region has been performed using non-uniform low-power quantum-cascade laser (QCL) and uniform high-power far-infrared laser (FIR laser) beams at 3 THz and 4.25 and 2.54 THz, respectively. A measurement comparison has been achieved in the infrared using a blackbody radiation. Different methods for noise-equivalent power (NEP) measurements have been investigated. These characterization methods are promising especially for non-uniform laser beams irradiated on pixel arrays. The NEP results obtained from the different methods are in good agreement independent of the method used in the experiments. The results show a high sensitivity of the THz-optimized pixel array in the THz region. Large beam area reflection imaging of obscured materials at 2.54 THz have been performed at video rates of 30 frames per second using the THz-optimized pixel array equipped with a semi-custom fast THz objective, proving that the INO THz camera provides a promising solution for stand-alone imaging systems.

A microbolometer-based THz imager

THz imaging is a very promising field rapidly growing in importance. This expanding field is at its early stage of development but already a large number of applications are foreseen. THz imaging promises to be a key technology in various fields, such as defense & security where it can be used to defeat camouflage. Based on its many years of experience in uncooled bolometers technology, INO has developed, assembled and characterized a prototype THz imager. The cameras 160 × 120 pixel array consists of pixels with a 52 μm pitch that have been optimized for the THz region. Custom camera electronics and an F/1 THz lens barrel complete the imager design. Real-time imaging at video rate of 30 frame/sec has been performed with a 3 THz quantum cascade laser set-up. THz images of numerous object-obscurant combinations are presented, proving the feasibility of video imaging in security screening applications.

Video-rate THz imaging using a microbolometer-based camera

A THz 160×120 pixel array camera has been developed at INO. Real-time transmission and reflectance imaging at video rates of 30 frames/s were performed with a low-power 3 THz quantum cascade laser. Various hidden objects were imaged, proving feasibility of real-time THz imaging for security screening applications.

Far infrared microbolometers for radiometric measurements of ice cloud

Focal planes of 80x60 VOx microbolometers with pixel pitch of 104 μm were developed in support of the remote sensing of ice clouds in the spectral range from 7.9 to 50 μm. A new design that relies on the use of central posts to support the microbolometer platform was shown effective in minimizing the structural deformation usually occurred in platforms of large area. A process for goldblack coating and patterning of the focal plane arrays was established. It was found that the goldblack absorbs more than 98 % and 92 % of incident light respectively at wavelengths shorter and longer than 20 μm. Moreover, a spectral uniformity of better than 96 % was achieved in all spectral channels required for the measurements. The noise figures derived from the data acquired over short periods of acquisition time showed the evidence of a correlation with the format of the addressed sub-arrays. This correlation was not observed in the data acquired over long periods of time, suggesting the presence of low frequency effects. Regardless of the length of acquisition time, an improvement of noise level could be confirmed when the operating temperature was increased. The dependence of responsivity on sub-array format and operating temperature was investigated. The noise equivalent power derived from this study was found to be in the range from 45 to 80 pW, showing that the far infrared focal plane arrays are suited for use in the intended application.

Introducing sub-wavelength pixel THz camera for the understanding of close pixel-to-wavelength imaging challenges

Conventional guidelines and approximations useful in macro-scale system design can become invalidated when applied to the smaller scales. An illustration of this is when camera pixel size becomes smaller than the diffraction-limited resolution of the incident light. It is sometimes believed that there is no benefit in having a pixel width smaller than the resolving limit defined by the Raleigh criterion, 1.22 λ F/#. Though this rarely occurs in todays imaging technology, terahertz (THz) imaging is one emerging area where the pixel dimensions can be made smaller than the imaging wavelength. With terahertz camera technology, we are able to achieve sub-wavelength pixel sampling pitch, and therefore capable of directly measuring if there are image quality benefits to be derived from sub-wavelength sampling. Interest in terahertz imaging is high due to potential uses in security applications because of the greater penetration depth of terahertz radiation compared to the infrared and the visible. This paper discusses the modification by INO of its infrared MEMS microbolometer detector technology toward a THz imaging platform yielding a sub-wavelength pixel THz camera. Images obtained with this camera are reviewed in this paper. Measurements were also obtained using microscanning to increase sampling resolution. Parameters such as imaging resolution and sampling are addressed. A comparison is also made with results obtained with an 8-12 μm band camera having a pixel pitch close to the diffractionlimit.

Development of MEMS microbolometer detector for THz applications

INO has been actively working on extending its microbolometer technology to THz applications. Several techniques have been developed recently to improve the performance of the microbolometer. This article will present these techniques and discuss some potential applications of INO THz microbolometer.

Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength

This paper reports on the development of a fully packaged focal plane array of broadband microbolometers. The detector makes use of a gold black thin film to expand its absorption range from 3 to 14 μm. A low temperature packaging process was developed to minimize sintering of the gold black absorber during vacuum sealing of the bolometer array package. The gold black absorber was also laser trimmed to prevent lateral diffusion of heat and promote a better MTF. The resulting FPAs show a NETD lower than 25 mK at a frame rate of 50 Hz

On the figure of merit of uncooled bolometers fabricated at INO

This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 μm are considered. The figure of merit of the characterized detectors is below 350 mK*ms.