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Heang Seuk Lee

Jeju National University

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Publication

Featured researches published by Heang Seuk Lee.

Thin Solid Films | 2011

Ultraviolet irradiation effect on the properties of leakage current and dielectric breakdown of low-dielectric-constant SiOC(H) films using comb capacitor structure

Chang Young Kim; R. Navamathavan; Heang Seuk Lee; Jong-Kwan Woo; Myung Taek Hyun; Kwang-Man Lee; Won Young Jeung; Chi Kyu Choi

Current Applied Physics | 2011

UV irradiation effects on the bonding structure and electrical properties of ultra low-k SiOC(–H) thin films for 45 nm technology node

Chi Kyu Choi; Chang Young Kim; R. Navamathavan; Heang Seuk Lee; Jong-Kwan Woo; Myung Taek Hyun; Heon Ju Lee; Won Young Jeung

Thin Solid Films | 2010

Study of Cu diffusion behavior in low dielectric constant SiOC(-H) films deposited by plasma-enhanced chemical vapor deposition

Chi Kyu Choi; Heang Seuk Lee; R. Navamathavan; Jong-Kwan Woo; Chang Young Kim

Journal of the Korean Physical Society | 2010

Frequency-dependent Capacitance-Voltage and Conductance-Voltage Characteristics of Low-dielectric-constant SiOC(-H) Thin Films Deposited by Using Plasma-enhanced Chemical Vapor Deposition

Chi Kyu Choi; Chang Young Kim; Heang Seuk Lee; Jong-Kwan Woo; R. Navamathavan; Kwang-Man Lee; Myung Taek Hyun

Thin Solid Films | 2010

Effect of evaporated copper and aluminum on post-annealed SiOC(–H) films deposited using plasma-enhanced chemical vapor deposition

Chang Young Kim; Heang Seuk Lee; R. Navamathavan; Jong-Kwan Woo; Chi Kyu Choi

Journal of the Korean Physical Society | 2010

Electrical Conduction in Low-dielectric-constant SiOC(-H) Films with Nano-pore Structures Deposited by Using Plasma-enhanced Chemical Vapor Deposition with Dimethyldimethoxysilane /O2 Precursors

Heang Seuk Lee; Chang Young Kim; Jong-Kwan Woo; Chi Kyu Choi; R. Navamathavan; Kwang-Man Lee

한국진공학회 학술발표회초록집 | 2009

Leakage current and electrical breakdown in plasma enhanced chemical vapor deposited low dielectric constant SiOC(-H) films

Heang Seuk Lee; Chang Young Kim; Jong Kwan Woo; Chi Kyu Choi

한국진공학회 학술발표회초록집 | 2009

Cu diffusion behavior in SiOC(-H) films with annealed Cu/SiOC(-H)/ p-Si(100)/Al metal-insulator-semiconductor (MIS) structures

Chi Kyu Choi; Heang Seuk Lee; Jong Kwan Woo; Chang Young Kim

한국진공학회 학술발표회초록집 | 2009

Interfaces properties of low dielectric constant SiOC(-H) films deposited by plasma enhanced chemical vapor deposition

Chang Young Kim; Heang Seuk Lee; Jong Kwan Woo; Chi Kyu Choi

Journal of the Korean Physical Society | 2009

Morphological and Compositional Changes at the SiOC(-H)/{itp}-Si(100) Interface Region Prepared by Using PECVD

Heang Seuk Lee; Chang Young Kim; R. Navamathavan; Jong-Kwan Woo; Younghun Yu; Chi Kyu Choi; Kwang-Man Lee

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Chang Young Kim

Jeju National University

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Chi Kyu Choi

Jeju National University

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R. Navamathavan

Jeju National University

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Jong-Kwan Woo

Jeju National University

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Kwang-Man Lee

Jeju National University

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Myung Taek Hyun

Jeju National University

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Heon Ju Lee

Jeju National University

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Young Hun Yu

Jeju National University

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