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Heeyeop Chae

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Publication

Featured researches published by Heeyeop Chae.

Archive | 2011

Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method

Kun Joo Park; Kwang Hoon Han; Kee Hyun Kim; Weon Mook Lee; Kyounghoon Han; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2016

Effect of thiophenol-based ligands on photoluminescence of quantum dot nanocrystals

Hyungseok Moon; Hoseok Jin; Bokyoung Kim; Hyunjin Kang; Daekyoung Kim; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2015

Sensitivity Enhancement of RF Plasma Etch Endpoint Detection With K-means Cluster Analysis

Honyoung Lee; Haegyu Jang; Hakseung Lee; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2015

Sensitivity Enhancement of Fault Detection in Plasma Etching Processes using Optical Emission Spectroscopy with Multivariate Analysis

Hakseung Lee; Haegyu Jang; Honyoung Lee; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2015

Colloidal CdSe/ZnS quantum dots and poly methyl methacrylate (PMMA) composite films for color conversion of blue OLED

Subin Jung; Namhun Kim; Ho Kyoon Chung; Heeyeop Chae

Vacuum Magazine | 2015

Plasma Monitoring by Multivariate Analysis Techniques

Haegyu Jang; Kyongbeom Koh; Honyoung Lee; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2014

Vertically Standing Graphene on Glass Substrate by PECVD

Yifei Ma; Wontae Hwang; Haegyu Jang; Heeyeop Chae

한국진공학회 학술발표회초록집 | 2014

RF Plasma Etching Endpoint Detection of Dielectric layers Using Optical Emission Spectroscopy with modified K-means Cluster Analysis

Hakseung Lee; Haegyu Jang; Heeyeop Chae

한국표면공학회 학술발표회 초록집 | 2013

Plasma Impedance Monitoring for RF Plasma Etching Endpoint Detection of Dielectric Layers with Real-time Cluster Analysis

Haegyu Jang; Heeyeop Chae

한국표면공학회 학술발표회 초록집 | 2013

Surface characterization of ultra low-k SiCOH films in inductively coupled fluorocarbon plasmas

Hoonbae Kim; Haegyu Jang; Donggeun Jung; Heeyeop Chae

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Collaboration

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Haegyu Jang

Sungkyunkwan University

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Daekyoung Kim

Yonsei University

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Guoqing Xin

Sungkyunkwan University

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Hoonbae Kim

Sungkyunkwan University

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Kun Joo Park

Seoul National University

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Wontae Hwang

Sungkyunkwan University

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Yifei Ma

Sungkyunkwan University

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Hi-Deok Lee

Chungnam National University

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Kyounghoon Han

Seoul National University

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Namhun Kim

Sungkyunkwan University

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