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Dive into the research topics where Helmut Beierl is active.

Publication


Featured researches published by Helmut Beierl.


Archive | 2000

Projection exposure lens with aspheric elements

David Shafer; Wilhelm Ulrich; Helmut Beierl


Archive | 2002

Catadioptric reduction lens

Alexander Epple; Helmut Beierl


Archive | 1999

Catadioptric optical system and exposure apparatus having the same

David Shafer; Helmut Beierl; Gerhard Fürter; Karl-Heinz Schuster; Wilhelm Ulrich


Archive | 2005

Projection lens system of a microlithographic projection exposure installation

Helmut Beierl; Sascha Bleidistel; Wolfgang Singer; Toralf Gruner; Alexander Epple; Norbert Wabra; Susanne Beder; Jochen Weber; Heiko Feldmann; Baerbel Schwaer; Olaf Rogalsky; Arif Kazi


Archive | 2002

Projection objective having adjacently mounted aspheric lens surfaces

Karl-Heinz Schuster; David Shafer; Wilhelm Ulrich; Helmut Beierl; Wolfgang Singer


Archive | 1999

Microlithographic reduction objective, projection exposure equipment and process

Karl-Heinz Schuster; Helmut Beierl


Archive | 2004

Projection objective for microlithography

Helmut Beierl; Heiko Feldmann; Jochen Hetzler; Michael Totzeck


Archive | 2003

Projection exposure system

Karl-Heinz Schuster; Wilhelm Ulrich; Toralf Gruner; Daniel Kraehmer; Wolfgang Singer; Alexander Epple; Helmut Beierl; Reiner Garreis


Archive | 2000

Catadioptric objective with physical beam splitter

Willi Ulrich; Helmut Beierl


Archive | 2000

Projection lens comprising adjacent aspheric lens surfaces

Helmut Beierl; Karl-Heinz Schuster; David Shafer

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