Karl Heinz Schuster | Researchain

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Featured researches published by Karl Heinz Schuster.

Archive | 2008

Microlithographic projection exposure apparatus

Aurelian Dodoc; Karl Heinz Schuster; Joerg Mallmann; Wilhelm Ulrich; Hans-Juergen Rostalski

Archive | 2004

Microlithographic projection exposure system

Aurelian Dodoc; Karl Heinz Schuster; Jörg Mallmann; Wilhelm Ulrich; Hans-Jürgen Rostalksi

Archive | 2001

Catadioptric microlithographic reduction objective

Karl Heinz Schuster

Archive | 2005

Illumination system for a wavelength of less than or equal to 193 nm, with sensors for determining an illumination

Wolfgang Singer; Martin Antoni; Johannes Wangler; Markus Weiss; Vadim Yevgenyevich Banine; Marcel Dierichs; Roel Moors; Karl Heinz Schuster; Axel Scholz; Philipp Bosselmann; Bernd Warm

Archive | 1997

Double-refracting planar plate arrangement and deep ultraviolet λ/4-plate

Karl Heinz Schuster

Archive | 2000

CATADIOPTIC OBJECTIVE LENS HAVING TWO INTERMEDIATE IMAGES

Gerd Fuerter; Alois Herkommer; Karl Heinz Schuster; David Shafer; Wilhelm Ulrich; Buenau Rudolf Von; アロイス・ヘルコマー; ヴィルヘルム・ウルリッヒ; カール−ハインツ・シュスター; ゲルト・フュルター; デイビッド・シェファー; ビュナウルドルフ・フォン

Archive | 2005

Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination

Wolfgang Singer; Martin Antoni; Johannes Wangler; Markus Weiss; Vadim Yevgenyevich Banine; Marcel Dierichs; Roel Moors; Karl Heinz Schuster; Axel Scholz; Philipp Bosselmann; Bernd Warm

Archive | 2007