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Dive into the research topics where Helmut Schönherr is active.

Publication


Featured researches published by Helmut Schönherr.


Thin Solid Films | 2009

A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Kurt Matoy; Helmut Schönherr; Thomas Detzel; Thomas Schöberl; Reinhard Pippan; Christian Motz; Gerhard Dehm


Thin Solid Films | 2010

Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Kurt Matoy; Helmut Schönherr; Thomas Detzel; Gerhard Dehm


Archive | 2002

Device for supplying gas mixtures to a cvd reactor

Rudolf Kogler; Helmut Schönherr; Silke Skrabl; Rolf Urschitz


Archive | 2016

Steuern des Reflow-Verhaltens von BPSG-Filmen und hiermit hergestellte Vorrichtungen

Jürgen Steinbrenner; Markus Kahn; Helmut Schönherr; Ravi Keshav Joshi; Heimo Hofer; Martin Pölzl; Harald Hütter


Archive | 2015

A process for coating a workpiece

Markus Kahn; Helmut Schönherr; Jürgen Steinbrenner


Archive | 2014

Herstellung von Haftstrukturen in dielektrischen Schichten unter Nutzung von Photoprozesstechnologie und Haftstrukturen einschließende Bauelemente

Thomas Grille; Ursula Hedenig; Ralph Muth; Jörg Plagmann; Helmut Schönherr


Archive | 2014

Kohlenstoffschichten für Hochtemperaturprozesse

Günter Denifl; Thomas Grille; Ursula Hedenig; Joachim Hirschler; Markus Kahn; Matthias Künle; Daniel Maurer; Roland Mönnich; Helmut Schönherr


Archive | 2014

Passivierungsschicht und Verfahren zum Herstellen einer Passivierungsschicht

Christoph Brunner; Silvana Fister; Herbert Gietler; Uwe Höckele; Markus Kahn; Christian Krenn; Hubert Maier; Kurt Matoy; Helmut Schönherr; Jürgen Steinbrenner; Elfriede Wellenzohn


Archive | 2014

Carbon coatings for high-temperature processes

Günter Denifl; Thomas Grille; Ursula Hedenig; Joachim Hirschler; Markus Kahn; Matthias Künle; Daniel Maurer; Roland Mönnich; Helmut Schönherr


Archive | 2014

Kohlenstoffschichten für Hochtemperaturprozesse Carbon coatings for high temperature processes

Günter Denifl; Thomas Grille; Ursula Hedenig; Joachim Hirschler; Markus Kahn; Matthias Künle; Daniel Maurer; Roland Mönnich; Helmut Schönherr

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