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Dive into the research topics where Henrik Zimmermann is active.

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Featured researches published by Henrik Zimmermann.


Applied Physics Letters | 2013

Sensitive trace gas detection with cavity enhanced absorption spectroscopy using a continuous wave external-cavity quantum cascade laser

J. H. van Helden; Norbert Lang; Uwe Macherius; Henrik Zimmermann; J Röpcke

Trace gas sensing in the mid-infrared using quantum cascade lasers (QCLs) promises high specificity and sensitivity. We report on the performance of a simple cavity enhanced absorption spectroscopy (CEAS) sensor using a continuous wave external-cavity QCL at 7.4 μm. A noise-equivalent absorption coefficient αmin of 2.6 × 10–8 cm–1 in 625 s was achieved, which corresponds to a detection limit of 6 ± 1 ppb of CH4 in 15 millibars air for the R(3) transition at 1327.074 cm–1. This is the highest value of noise-equivalent absorption and among the longest effective path length (1780 m) reported to date with QCL-based CEAS.


Optics Express | 2016

Sensitive CH 4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy

Norbert Lang; Uwe Macherius; Mathias Wiese; Henrik Zimmermann; J Röpcke; J. H. van Helden

We report on sensitive detection of atmospheric methane employing quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy (OF-CEAS). An instrument has been built utilizing a continuous-wave distributed feedback quantum cascade laser (cw-QCL) with a V-shaped cavity, a common arrangement that reduces feedback to the laser from non-resonant reflections. The spectrometer has a noise equivalent absorption coefficient of 3.6 × 10-9 cm-1 Hz-1/2 for a spectral scan of CH4 at 7.39 μm. From an Allan-Werle analysis a detection limit of 39 parts per trillion of CH4 at atmospheric pressure within 50 s acquisition time was found.


Sensors | 2018

RES-Q-Trace: A Mobile CEAS-Based Demonstrator for Multi-Component Trace Gas Detection in the MIR

Norbert Lang; Uwe Macherius; Henrik Zimmermann; Sven Glitsch; Mathias Wiese; Jürgen Röpcke; Jean-Pierre H. van Helden

Sensitive trace gas detection plays an important role in current challenges occurring in areas such as industrial process control and environmental monitoring. In particular, for medical breath analysis and for the detection of illegal substances, e.g., drugs and explosives, a selective and sensitive detection of trace gases in real-time is required. We report on a compact and transportable multi-component system (RES-Q-Trace) for molecular trace gas detection based on cavity-enhanced techniques in the mid-infrared (MIR). The RES-Q-Trace system can operate four independent continuous wave quantum or interband cascade lasers each combined with an optical cavity. Twice the method of off-axis cavity-enhanced absorption spectroscopy (OA-CEAS) was used, twice the method of optical feedback cavity-enhanced absorption spectroscopy (OF-CEAS), respectively. Multi-functional software has been implemented (i) for the general system control; (ii) to drive the four different laser sources and (iii) to analyze the detector signals for concentration determination of several molecular species. For the validation of the versatility and the performance of the RES-Q-Trace instrument the species NO, N2O, CH4, C2H4 and C3H6O, with relevance in the fields of breath gas analysis and the detection of explosives have been monitored in the MIR with detection limits at atmospheric pressure in the ppb and ppt range.


Mathematics in Computer Science | 2016

Sensitive Spectroscopy of Plasmas in the Mid-Infrared Spectral Range

Jean-Pierre H. van Helden; Norbert Lang; Andy Nave; Uwe Macherius; Henrik Zimmermann; Mathias Wiese; J Röpcke

To improve the efficiency of many industrial plasma processes, more insight into the plasma chemistry is required. Therefore, the detection and quantitative measurement of important species is a major challenge. We will discuss examples of species detection applying laser-based diagnostics in the mid-infrared using quantum cascade lasers (QCLs) and interband cascade lasers (ICLs). A further increase in sensitivity to detection limits of ppm down to ppt levels can be achieved by combining the lasers with cavity enhanced techniques. We present results of an ICL coupled to a V-shaped optical cavity in an optical feedback cavity enhanced absorption spectroscopy (OF-CEAS) experiment.


Laser Applications to Chemical, Security and Environmental Analysis | 2016

Applying Quantum Cascade Laser Based Optical Feedback Cavity-enhanced Absorption Spectroscopy in Sensing Atmospheric Methane

Norbert Lang; Uwe Macherius; Mathias Wiese; Henrik Zimmermann; J Röpcke; Jean-Pierre H. van Helden

We report on recent progress applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy in sensing atmospheric methane in the mid-infrared spectral range.


Applied Physics B | 2015

On treatment of ultra-low-k SiCOH in CF4 plasmas: correlation between the concentration of etching products and etching rate

Norbert Lang; Sven Zimmermann; Henrik Zimmermann; Uwe Macherius; B. Uhlig; Matthias Schaller; Stefan E. Schulz; J. Röpcke


Applied Physics Letters | 2014

Addendum: “Sensitive trace gas detection with cavity enhanced absorption spectroscopy using a continuous wave external-cavity quantum cascade laser” [Appl. Phys. Lett. 103, 131114 (2013)]

J. H. van Helden; Norbert Lang; Uwe Macherius; Henrik Zimmermann; J Röpcke


Journal of Sensors and Sensor Systems | 2017

Purity monitoring in medical gas supply lines with quantum cascade laser technology

Henrik Zimmermann; Mathias Wiese; Luigi Fiorani; Alessandro Ragnoni


Light, Energy and the Environment 2015 (2015), paper ETh2A.1 | 2015

On Recent Progress Applying Quantum Cascade Lasers in Sensing for Environmental and Plasma Diagnostics

Jean-Pierre H. van Helden; Norbert Lang; Uwe Macherius; Henrik Zimmermann; Sven Glitsch; Mathias Wiese; Juergen Roepcke


Archive | 2010

Method for controlling gas flow in process chamber for e.g. surface processing, in semiconductor industry, involves actively controlling mass flow controller in-situ based on concentration measurement of molecules, atoms, radicals and ions

Norbert Lang; Uwe Macherius; Jürgen Röpcke; Dieter Dipl.-Ing. Schlott; Stephan Wege; Klaus-Dieter Prof. Dr. Weltmann; Henrik Zimmermann

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