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Hideo Haraguchi

Panasonic

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Publication

Featured researches published by Hideo Haraguchi.

Archive | 1998

Method and device for plasma treatment

Tomohiro Okumura; Ichiro Nakayama; Shozo Watanabe; Hideo Haraguchi

Archive | 2008

VACUUM PROCESSING APPARATUS AND METHOD

Hideo Haraguchi; Masaki Suzuki; Toshimichi Ishida

Archive | 1995

Method of handling wafers in a vacuum processing apparatus

Hideo Haraguchi; Masaki Suzuki; Toshimichi Ishida

Archive | 1999

Substrate temperature control method and device

Izuru Matsuda; Hideo Haraguchi

Archive | 2000

Plasma pcocessing system

Hideo Haraguchi; Akizo Watanabe; 秀夫 原口; 彰三 渡邉

Archive | 2001

Substrate detecting method and device

Hideo Haraguchi; Izuru Matsuda; Shigeyuki Yamamoto

Archive | 1999

Wafer handling apparatus

Hideo Haraguchi; Izuru Matsuda

Archive | 1999

Method and apparatus for positioning a disk-shaped object

Hideo Haraguchi; Izuru Matsuda

Archive | 1999

Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith

Izuru Matsuda; Hideo Haraguchi; Shigeyuki Yamamoto

Archive | 1999

Substrate removal control method of vacuum treatment apparatus and vacuum treatment apparatus

Hideo Haraguchi; Izuru Matsuda; 秀夫 原口; 出 松田

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Izuru Matsuda

Panasonic

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Shigeyuki Yamamoto

Panasonic

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Ichiro Nakayama

Panasonic

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Toshimichi Ishida

Panasonic

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Masaki Suzuki

Panasonic

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Shozo Watanabe

Panasonic

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Tomohiro Okumura

Panasonic

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