Izuru Matsuda
Panasonic
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Publication
Featured researches published by Izuru Matsuda.
international microprocesses and nanotechnology conference | 2003
Tomohiro Okumura; Mitsuo Saitoh; Izuru Matsuda
In this paper, various micro plasma sources have been proposed. We have already proposed two types of line shaped micro plasma sources. This report presents a new type of line shaped micro plasma source for finer processing than the former two types and its application to fine pattern etching of a silicon substrate.
Archive | 1999
Izuru Matsuda; Hideo Haraguchi
Archive | 2001
Hideo Haraguchi; Izuru Matsuda; Shigeyuki Yamamoto
Archive | 2001
Tomohiro Okumura; Yukihiro Maegawa; Izuru Matsuda
Archive | 1999
Hideo Haraguchi; Izuru Matsuda
Archive | 1999
Hideo Haraguchi; Izuru Matsuda
Archive | 1999
Izuru Matsuda; Hideo Haraguchi; Shigeyuki Yamamoto
Archive | 1999
Hideo Haraguchi; Izuru Matsuda; 秀夫 原口; 出 松田
Archive | 2000
Hideo Haraguchi; Izuru Matsuda; Shigeyuki Yamamoto; 秀夫 原口; 重之 山本; 出 松田
Archive | 1999
Hideo Haraguchi; Izuru Matsuda
