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Hideo Komatsu

Hitachi

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Publication

Featured researches published by Hideo Komatsu.

Archive | 1979

Method for dry-etching aluminum and aluminum alloys

Shinya Iida; Kazuyoshi Ueki; Hideo Komatsu; Tatsumi Mitzutani

Archive | 1980

Method and apparatus for monitoring etching

Tatsumi Mizutani; Kazuyoshi Ueki; Shinya Iida; Hideo Komatsu

Archive | 1980

Method for preventing corrosion of Al and Al alloys

Shinya Iida; Kazuyoshi Ueki; Tatsumi Mizutani; Hideo Komatsu; Kado Hirobe

Archive | 1981

Method for dry-etching

Hideo Komatsu; Shinya Iida; Tatsumi Mizutani; Kazuyoshi Ueki

Archive | 1982

Process for dry etching of aluminum and its alloy

Tatsumi Mizutani; Toshihide Ohgata; Hideo Komatsu

Archive | 1980

Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching

Tatsumi Mizutani; Norio Kanai; Kunio Harada; Hideo Komatsu; Shinya Iida

Archive | 1982

Process for dry-etching an aluminum alloy.

Tatsumi Mizutani; Toshihide Ohgata; Hideo Komatsu

Archive | 1977

Method of etching a1 and a1-based alloy

Shinya Iida; Hideo Komatsu; Tatsumi Mizutani

Archive | 1980

Ueberwachungs-verfahren und waechter fuer aetzen

Tatsumi Mizutani; Kazuyoshi Ueki; Shinya Iida; Hideo Komatsu

Archive | 1980

Plasmaaetzer Plasma etcher

Tatsumi Mizutani; Norio Kanai; Kunio Harada; Hideo Komatsu; Shinya Iida

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Collaboration

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Tatsumi Mizutani

Hitachi

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Shinya Iida

Hitachi

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Kazuyoshi Ueki

Hitachi

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Kunio Harada

Hitachi

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Norio Kanai

Hitachi

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Toshihide Ohgata

Hitachi

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Kado Hirobe

Hitachi

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Tatsumi Mitzutani

Hitachi

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