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Norio Kanai

Hitachi

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Publication

Featured researches published by Norio Kanai.

Archive | 1986

Vacuum processing unit and apparatus

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai

Archive | 1989

Molecular-beam epitaxy apparatus

Naoyuki Tamura; Hideaki Kamohara; Norio Kanai; Kazuaki Ichihashi

Archive | 1980

Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching

Tatsumi Mizutani; Norio Kanai; Kunio Harada; Hideo Komatsu; Shinya Iida

Archive | 1984

Treatment of microwave plasma

Norio Kanai; Shigeru Nishimatsu; Sadayuki Okudaira; Fumio Shibata; Noriaki Yamamoto

Archive | 1986

SUBSTRATE INTRODUCING DEVICE FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Norio Kanai; Hideaki Kanbara; Nushito Takahashi; Naoyuki Tamura

Archive | 1984

Vorrichtung und anlage fuer die durchfuehrung einer behandlung unter vakuum

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai

Archive | 1995

METHOD FOR TREATING SEMICONDUCTOR SUBSTRATE AND APPARATUS THEREFOR

Yoshimasa Fukushima; Yutaka Kakehi; Norio Kanai; Norio Nakazato; Fumio Shibata; Tsunehiko Tsubone; 則男 仲里; 恒彦 坪根; 豊 掛樋; 史雄 柴田; 喜正 福島; 謙雄 金井

Archive | 1986

Geraet fuer molekularstrahlepitaxie. Geraet for molecular beam epitaxy.

Naoyuki Tamura; Hideaki Kamohara; Norio Kanai; Kazuaki Ichihashi

Archive | 1984

An apparatus for treating a sample in vacuo

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai

Archive | 1984

Vorrichtung zur Behandlung einer Probe im Vakuum An apparatus for treating a sample in vacuo

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai

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Fumio Shibata

Hitachi

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Norio Nakazato

Hitachi

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Tsunehiko Tsubone

Hitachi

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Yoshimasa Fukushima

Hitachi

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Yutaka Kakehi

Hitachi

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Naoyuki Tamura

Hitachi

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Hideaki Kamohara

Hitachi

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Hideo Komatsu

Hitachi

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Kazuaki Ichihashi

Hitachi

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Kunio Harada

Hitachi

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