Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Norio Kanai is active.

Publication


Featured researches published by Norio Kanai.


Archive | 1986

Vacuum processing unit and apparatus

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai


Archive | 1989

Molecular-beam epitaxy apparatus

Naoyuki Tamura; Hideaki Kamohara; Norio Kanai; Kazuaki Ichihashi


Archive | 1980

Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching

Tatsumi Mizutani; Norio Kanai; Kunio Harada; Hideo Komatsu; Shinya Iida


Archive | 1984

Treatment of microwave plasma

Norio Kanai; Shigeru Nishimatsu; Sadayuki Okudaira; Fumio Shibata; Noriaki Yamamoto


Archive | 1986

SUBSTRATE INTRODUCING DEVICE FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Norio Kanai; Hideaki Kanbara; Nushito Takahashi; Naoyuki Tamura


Archive | 1984

Vorrichtung und anlage fuer die durchfuehrung einer behandlung unter vakuum

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai


Archive | 1995

METHOD FOR TREATING SEMICONDUCTOR SUBSTRATE AND APPARATUS THEREFOR

Yoshimasa Fukushima; Yutaka Kakehi; Norio Kanai; Norio Nakazato; Fumio Shibata; Tsunehiko Tsubone; 則男 仲里; 恒彦 坪根; 豊 掛樋; 史雄 柴田; 喜正 福島; 謙雄 金井


Archive | 1986

Geraet fuer molekularstrahlepitaxie. Geraet for molecular beam epitaxy.

Naoyuki Tamura; Hideaki Kamohara; Norio Kanai; Kazuaki Ichihashi


Archive | 1984

An apparatus for treating a sample in vacuo

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai


Archive | 1984

Vorrichtung zur Behandlung einer Probe im Vakuum An apparatus for treating a sample in vacuo

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai

Collaboration


Dive into the Norio Kanai's collaboration.

Researchain Logo
Decentralizing Knowledge