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Hidetaka Kafuku

Mitsubishi Heavy Industries

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Publication

Featured researches published by Hidetaka Kafuku.

Archive | 2009

Plasma processing method and plasma processing system

Tadashi Shimazu; Seiji Nishikawa; Hidetaka Kafuku

Archive | 2009

INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR PRODUCING INSULATING FILM FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, AND PROCESS FOR PRODUCING THE SEMICONDUCTOR DEVICE

Hidetaka Kafuku; Toshihito Fujiwara; Toshihiko Nishimori; Tadashi Shimazu; Naoki Yasuda; Hideharu Nobutoki; Teruhiko Kumada; Takuya Kamiyama; Tetsuya Yamamoto; Shinya Shibata

Archive | 2011

METHOD AND APPARATUS FOR PRODUCING SILICON NITRIDE FILM

Seiji Nishikawa; Hidetaka Kafuku; Tadashi Shimazu

Archive | 2011

Semiconductor light-emitting element, protective film for semiconductor light-emitting element, and process for production of the protective film

Hidetaka Kafuku; Toshihiko Nishimori; Hisao Kawasaki

Archive | 2011

Semiconductor light-emitting element, protective film of semiconductor light-emitting element, and method for fabricating same

Hidetaka Kafuku; Toshihiko Nishimori; Hisao Kawasaki

Archive | 2013

LEAKAGE PREVENTION SEAL, AND PUMP FOR NUCLEAR REACTOR COOLING MATERIAL

Hidetaka Kafuku; Hidekazu Uehara; Yukihiro Sakaguchi

Archive | 2011

SILICON NITRIDE FILM FOR SEMICONDUCTOR ELEMENT, AND METHOD AND APPARATUS FOR MANUFACTURING SILICON NITRIDE FILM

Seiji Nishikawa; Hidetaka Kafuku

Archive | 2008

PLASMA FILM FORMING APPARATUS

Hidetaka Kafuku; Tadashi Shimazu; Ryuichi Matsuda; Akihiko Matsukura; Seiji Nishikawa

Archive | 2014

FLEXIBLE THERMAL-CONTROL MATERIAL, AND PRODUCTION METHOD THEREFOR

Naoki Kusaba; Hidetaka Kafuku; Kenji Najima

Archive | 2014

FLEXIBLE THERMAL-CONTROL MATERIAL

Naoki Kusaba; Hidetaka Kafuku; Kenji Najima

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Collaboration

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Seiji Nishikawa

Mitsubishi Heavy Industries

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Tadashi Shimazu

Mitsubishi Heavy Industries

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Toshihiko Nishimori

Mitsubishi Heavy Industries

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Hisao Kawasaki

Mitsubishi Heavy Industries

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Kenji Najima

Mitsubishi Heavy Industries

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Naoki Kusaba

Mitsubishi Heavy Industries

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Akihiko Matsukura

Mitsubishi Heavy Industries

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Hideharu Nobutoki

Mitsubishi Heavy Industries

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Hidekazu Uehara

Mitsubishi Heavy Industries

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Naoki Yasuda

Mitsubishi Heavy Industries

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