Tadashi Shimazu
Mitsubishi Heavy Industries
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Tadashi Shimazu.
Japanese Journal of Applied Physics | 2008
Katsumi Suemitsu; Yuichi Kawano; Hiroaki Utsumi; Hiroaki Honjo; Ryusuke Nebashi; Shinsaku Saito; Norikazu Ohshima; Tadahiko Sugibayashi; Hiromitsu Hada; Tatsuhiko Nohisa; Tadashi Shimazu; Masahiko Inoue; Naoki Kasai
Embedded magnetoresistive random access memory (MRAM) with multi-level interconnects necessitates that magnetic tunnel junction (MTJ) devices have a thermal stability of 350 °C or higher during fabrication. We have improved thermal stability of MRAM devices using SiN protective film deposited by high-density plasma chemical vapor deposition (HDP-CVD) at 200 °C. The MTJ devices with HDP-CVD SiN protective film did not degrade after post-annealing at 350 °C, which suggests that the HDP-CVD process reduced oxide metal on the etched surface of the MTJ devices and that the SiN film blocked H2O diffusion from the interlayer dielectric film during post-annealing at 350 °C. We also fabricated a 1-kbit MRAM array and experimentally demonstrated thermal stability at 350 °C.
The Japan Society of Applied Physics | 2007
Katsumi Suemitsu; Yuichi Kawano; Hiroaki Utsumi; Hiroaki Honjo; Ryusuke Nebashi; Shinsaku Saito; Norikazu Ohshima; Tadahiko Sugibayashi; Hiromitsu Hada; Tatsuhiko Nohisa; Tadashi Shimazu; Masahiko Inoue; Naoki Kasai
SiN Protective Film Deposited by HDP CVD Katsumi Suemitsu, Yuichi Kawano, Hiroaki Utsumi, Hiroaki Honjo, Ryusuke Nebashi, Shinsaku Saito, Norikazu Ohshima, Tadahiko Sugibayashi, Hiromitsu Hada, Tatsuhiko Nohisa, Tadashi Shimazu, Masahiko Inoue and Naoki Kasai NEC Corporation, Device Platforms Research Laboratories, 1120 Shimokuzawa, Sagamihara, Kanagawa, 229-1198, Japan Phone: +81-42-771-0631 E-mail: [email protected] Mitsubishi Heavy Industries, LTD., Semiconductor Manufacturing Equipment Office, 1-1-1 Wadasaki-cho, Hyogo-ku, Kobe, Hyogo 652-8585, Japan
Archive | 2009
Tadashi Shimazu; Seiji Nishikawa; Hidetaka Kafuku
Archive | 2007
Tadashi Shimazu; Yuichi Kawano
Archive | 2003
Toshio Ida; Toshihiko Nishimori; Tadashi Shimazu; Kenjiro Uemitsu; 憲二郎 上満; 俊雄 井田; 正 嶋津; 年彦 西森
Archive | 2009
Hidetaka Kafuku; Toshihito Fujiwara; Toshihiko Nishimori; Tadashi Shimazu; Naoki Yasuda; Hideharu Nobutoki; Teruhiko Kumada; Takuya Kamiyama; Tetsuya Yamamoto; Shinya Shibata
Archive | 2003
Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue
Archive | 2011
Seiji Nishikawa; Hidetaka Kafuku; Tadashi Shimazu
Archive | 2007
Tadashi Shimazu; Yuichi Kawano
Archive | 2007
Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue