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Featured researches published by Tadashi Shimazu.


Japanese Journal of Applied Physics | 2008

Improvement of Thermal Stability of Magnetoresistive Random Access Memory Device with SiN Protective Film Deposited by High-Density Plasma Chemical Vapor Deposition

Katsumi Suemitsu; Yuichi Kawano; Hiroaki Utsumi; Hiroaki Honjo; Ryusuke Nebashi; Shinsaku Saito; Norikazu Ohshima; Tadahiko Sugibayashi; Hiromitsu Hada; Tatsuhiko Nohisa; Tadashi Shimazu; Masahiko Inoue; Naoki Kasai

Embedded magnetoresistive random access memory (MRAM) with multi-level interconnects necessitates that magnetic tunnel junction (MTJ) devices have a thermal stability of 350 °C or higher during fabrication. We have improved thermal stability of MRAM devices using SiN protective film deposited by high-density plasma chemical vapor deposition (HDP-CVD) at 200 °C. The MTJ devices with HDP-CVD SiN protective film did not degrade after post-annealing at 350 °C, which suggests that the HDP-CVD process reduced oxide metal on the etched surface of the MTJ devices and that the SiN film blocked H2O diffusion from the interlayer dielectric film during post-annealing at 350 °C. We also fabricated a 1-kbit MRAM array and experimentally demonstrated thermal stability at 350 °C.


The Japan Society of Applied Physics | 2007

Improvement of Thermal Stability of MRAM Device with SiN Protective Film Deposited by HDP CVD

Katsumi Suemitsu; Yuichi Kawano; Hiroaki Utsumi; Hiroaki Honjo; Ryusuke Nebashi; Shinsaku Saito; Norikazu Ohshima; Tadahiko Sugibayashi; Hiromitsu Hada; Tatsuhiko Nohisa; Tadashi Shimazu; Masahiko Inoue; Naoki Kasai

SiN Protective Film Deposited by HDP CVD Katsumi Suemitsu, Yuichi Kawano, Hiroaki Utsumi, Hiroaki Honjo, Ryusuke Nebashi, Shinsaku Saito, Norikazu Ohshima, Tadahiko Sugibayashi, Hiromitsu Hada, Tatsuhiko Nohisa, Tadashi Shimazu, Masahiko Inoue and Naoki Kasai NEC Corporation, Device Platforms Research Laboratories, 1120 Shimokuzawa, Sagamihara, Kanagawa, 229-1198, Japan Phone: +81-42-771-0631 E-mail: [email protected] Mitsubishi Heavy Industries, LTD., Semiconductor Manufacturing Equipment Office, 1-1-1 Wadasaki-cho, Hyogo-ku, Kobe, Hyogo 652-8585, Japan


Archive | 2009

Plasma processing method and plasma processing system

Tadashi Shimazu; Seiji Nishikawa; Hidetaka Kafuku


Archive | 2007

SEASONING METHOD FOR FILM-FORMING APPARATUS

Tadashi Shimazu; Yuichi Kawano


Archive | 2003

Deposition method of silicon nitride film

Toshio Ida; Toshihiko Nishimori; Tadashi Shimazu; Kenjiro Uemitsu; 憲二郎 上満; 俊雄 井田; 正 嶋津; 年彦 西森


Archive | 2009

INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR PRODUCING INSULATING FILM FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, AND PROCESS FOR PRODUCING THE SEMICONDUCTOR DEVICE

Hidetaka Kafuku; Toshihito Fujiwara; Toshihiko Nishimori; Tadashi Shimazu; Naoki Yasuda; Hideharu Nobutoki; Teruhiko Kumada; Takuya Kamiyama; Tetsuya Yamamoto; Shinya Shibata


Archive | 2003

Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method

Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue


Archive | 2011

METHOD AND APPARATUS FOR PRODUCING SILICON NITRIDE FILM

Seiji Nishikawa; Hidetaka Kafuku; Tadashi Shimazu


Archive | 2007

METHOD OF SEASONING FILM-FORMING APPARATUS

Tadashi Shimazu; Yuichi Kawano


Archive | 2007

Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method

Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue

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Masahiko Inoue

Mitsubishi Heavy Industries

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Yuichi Kawano

Mitsubishi Heavy Industries

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Hidetaka Kafuku

Mitsubishi Heavy Industries

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Ryuichi Matsuda

Mitsubishi Heavy Industries

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Seiji Nishikawa

Mitsubishi Heavy Industries

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