Is this you? Create Your Porfile
Avatar

Hikaru Sugita

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Hikaru Sugita is active.

Explore More

Publication

Featured researches published by Hikaru Sugita.

Archive | 2000

Composition for resist underlayer film and method for producing the same

Hikaru Sugita; Akio Saito; Kinji Yamada; Michinori Nishikawa; Yoshihisa Ohta; Yoshiji Yuumoto

Archive | 2003

Acenaphthylene derivative, polymer, and antireflection film-forming composition

Hikaru Sugita; Keiji Konno; Masato Tanaka; Tsutomu Shimokawa

Journal of Applied Polymer Science | 2003

Spin‐on‐glass (SOG) for the trilayer imaging process

Hikaru Sugita; Akio Saito; Keiji Konno; Akihiro Hayasui; Satoru Nishiyama; Masahiko Ebisawa; Michinori Nishikawa; Yoshihisa Ohta; Tetsuo Tominaga

Journal of Applied Polymer Science | 2018

Positive‐tone photoresist consisting of a multifunctional acrylate resin that can be patterned after photo‐crosslinking

Hikaru Sugita; Yuka Miyashita; Hiroyuki Suzuki; Shingo Takasugi; Nobuji Matsumura; Mitsuyo Yoshizawa

Microelectronic Engineering | 2018

Photosensitive anti-biofouling polycarboxymethylbetaine coating: Polymerization, photolithography, and cell aggregation along the pattern geometry

Hikaru Sugita; Tarou Uchida; Shoichi Kato; Kiyoshi Suda; Masaaki Miyaji

Microelectronic Engineering | 2018

I-line photoresist composed of multifunctional acrylate, photo initiator, and photo acid generator, which can be patterned after g-line photo-crosslinking

Hikaru Sugita; Nobuji Matsumura

Journal of Applied Polymer Science | 2015

Styryl silsesquioxane photoresist

Hikaru Sugita; Kei Tanaka; Kaori Shirato; Ryota Yamamoto; Kazuko Tateshima

Archive | 2003

Derivate und Polymere von Acenaphthylen und Zusammensetzung enthalten Antireflektionsfilm

Hikaru Sugita; Keiji Konno; Masato Tanaka; Tsutomu Shimokawa

Archive | 2003

Derivate und Polymere von Acenaphthylen und Zusammensetzung enthalten Antireflektionsfilm Derivatives and polymers of acenaphthylene and composition containing anti-reflection film

Hikaru Sugita; Keiji Konno; Masato Tanaka; Tsutomu Shimokawa

Archive | 2001

Compositions for under-resist film and processes for producing the same, and under-resist films and processes for producing the same

Keiji Konno; Kazuo Kawaguchi; Masato Tanaka; Yasutaka Kobayashi; Akihiro Hayashi; Hikaru Sugita; Yuichi Hashiguchi

Explore More

Collaboration

Dive into the Hikaru Sugita's collaboration.

Top Co-Authors
Avatar

Masato Tanaka

National Institute of Advanced Industrial Science and Technology

View shared research outputs
Top Co-Authors
Avatar

Tsutomu Shimokawa

Kanagawa University

View shared research outputs
Top Co-Authors
Avatar

Kinji Yamada

Toshiba

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge