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Dive into the research topics where Hilde De Witte is active.

Publication


Featured researches published by Hilde De Witte.


Archive | 2005

Remote plasma activated nitridation

Johan Swerts; Hilde De Witte; Jan Willem Maes; Christophe F. Pomarede; Ruben Haverkort; Yuet Mei Wan; Marinus J. De Blank; Cornelius A. van der Jeugd; Jacobus Johannes Beulens


Archive | 2005

Silicon oxide cap over high dielectric constant films

Jan Willem Maes; Hilde De Witte; Christophe F. Pomarede


Archive | 2000

Analytical characterization of new high k dielectric stacks

Hilde De Witte; Thierry Conard; Hugo Bender; Wilfried Vandervorst


208th ECS Meeting | 2006

Evaluation of Nb(Si)N as Metal Gate Material

Nausikaa Van Hoornick; Hilde De Witte; Thomas Witters; Chao Zhao; Thierry Conard; Hannu Huatori; Johan Swerts; Tom Schram; Jan Maes; Stefan De Gendt; Marc Heyns


Archive | 2000

Quantitative TOFSIMS depth profiling of ultra thin silicon oxynitride films

Thierry Conard; Hilde De Witte; Marc Schaekers; Wilfried Vandervorst


Archive | 2000

Characterization of (ultra)thin dielectrica

Wilfried Vandervorst; Hilde De Witte; Thierry Conard; Tom Janssens; Marc Schaekers; Bert Brijs; Michel Houssa


Archive | 2000

Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?

Hilde De Witte; Thierry Conard; Wilfried Vandervorst


Archive | 2000

Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends

Javier Serrano; Hilde De Witte; B Guzman; J. M Blanco; Wilfried Vandervorst


Archive | 1999

High resolution dopant/carrier profiling for deep submicron technologies

Wilfried Vandervorst; Trudo Clarysse; Peter De Wolf; Pierre Eyben; Bart Haegeman; Mingwei Xu; Thomas Trenkler; Thomas Hantschel; Robert Stephenson; Thierry Conard; Hilde De Witte


Archive | 1999

Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers

Wilfried Vandervorst; Thierry Conard; Hilde De Witte; G. A Cooke

Collaboration


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Thierry Conard

Katholieke Universiteit Leuven

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Marc Schaekers

Katholieke Universiteit Leuven

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Johan Swerts

Katholieke Universiteit Leuven

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