Hiroshi Hayata

High-performance MgO thin films for PDPs with a high-rate sputtering-deposition process

— A high-rate sputtering-deposition process for MgO thin films for PDP fabrication was recently developed. The deposition rate of the MgO thin film was about 300 nm/min which shows the possibility of production-line application. The MgO film deposited in this work has a higher density than that of other deposition processes such as electron-beam deposition and shows good discharge characteristics including firing voltage and discharge formation. These were achieved by controlling the stoichiometry and/or the impurity doping during the sputtering process.