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Hirota Yoshihiro

Tokyo Electron

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Publication

Featured researches published by Hirota Yoshihiro.

Archive | 2005

Capacitance measurement method of micro structures of integrated circuits

Matsumoto Toshiyuki; Yakabe Masami; Hirota Yoshihiro

Archive | 2000

INFINITESIMAL CAPACITY MEASURING SYSTEM AND PROBING SYSTEM

Hirota Yoshihiro; Matsumoto Toshiyuki

Archive | 2010

SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR

Hirota Yoshihiro

Archive | 2007

DIELECTRIC MATERIAL FILM CAPACITOR AND METHOD OF MANUFACTURING SAME

Shinoda Tomotaka; Yamada Kinji; Kitano Takahiro; Yamanishi Yoshiki; Harada Muneo; Kawaguchi Tatsuzo; Hirota Yoshihiro; Okumura Katsuya

Archive | 2007

DIELECTRIC MATERIAL FILM CAPACITOR AND MANUFACTURING METHOD THEREOF

Shinoda Tomotaka; Yamada Kinji; Kitano Takahiro; Yamanishi Yoshiki; Harada Muneo; Kawaguchi Tatsuzo; Hirota Yoshihiro; Okumura Katsuya; Kono Shuichi

Archive | 2007

METHOD AND DEVICE FOR FORMING DIELECTRIC THIN FILM OF ABOx TYPE PEROVSKITE CRYSTAL STRUCTURE

Okumura Katsuya; Kitano Takahiro; Yamanishi Yoshiki; Harada Muneo; Kawaguchi Tatsuzo; Hirota Yoshihiro

Archive | 1997

CAPACITIVE ELEMENT OF SEMICONDUCTOR DEVICE

Hirota Yoshihiro; Matsumoto Toshiyuki

Archive | 2009

STATIC CAPACITANCE SENSOR COMPONENT, OBJECT MOUNTING BODY, SEMICONDUCTOR MANUFACTURING DEVICE, AND LIQUID CRYSTAL DISPLAY ELEMENT MANUFACTURING DEVICE

Hirota Yoshihiro; Matsumoto Toshiyuki

Archive | 2007

DIELECTRIC FILM HAVING ABOx-TYPE PEROVSKITE CRYSTALLINE STRUCTURE, CAPACITOR USING THE DIELECTRIC FILM, AND METHOD AND SYSTEM FOR FORMATION OF DIELECTRIC FILM HAVING ABOx-TYPE PEROVSKITE CRYSTALLINE STRUCTURE

Okumura Katsuya; Yamada Kinji; Shinoda Tomotaka; Wang Dao-Hai; Kitano Takahiro; Yamanishi Yoshiki; Harada Muneo; Kawaguchi Tatsuzo; Hirota Yoshihiro; Matsuda Kenji

Archive | 2007

Method for manufacture of dielectric film having ABOx type of perovskite-type crystalline structure

Kitano Takahiro; Yamanishi Yoshiki; Harada Muneo; Kawaguchi Tatsuzo; Hirota Yoshihiro; Okumura Katsuya

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Matsumoto Toshiyuki

Tokyo Electron

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Okumura Katsuya

Toshiba

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Yakabe Masami

Tokyo Electron

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Nagai Hiroyuki

Tokyo Electron

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Suzuki Mikio

Tokyo Electron

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Kikuchi Yuuki

Tokyo Electron

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Harada Muneo

Tokyo Electron

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Matsuda Kenji

Tokyo Electron

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