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Yakabe Masami

Tokyo Electron

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Publication

Featured researches published by Yakabe Masami.

Archive | 2005

Capacitance measurement method of micro structures of integrated circuits

Matsumoto Toshiyuki; Yakabe Masami; Hirota Yoshihiro

Archive | 2009

DISPLACEMENT AMOUNT DETECTOR OF MICROSTRUCTURE

Ikeuchi Naoki; Yakabe Masami

Archive | 2003

IMPEDANCE DETECTOR CIRCUIT, METHOD THEREFOR AND CAPACITANCE DETECTOR CIRCUIT

Yakabe Masami; Ikeuchi Naoki

Archive | 2007

PROBE CARD, AND INSPECTION DEVICE FOR MICROSTRUCTURE

Yakabe Masami; Ikeuchi Naoki

Archive | 2007

SYSTEM, CIRCUIT AND METHOD FOR MEASURING RESISTANCE OF WHEATSTONE BRIDGE, AND COMPUTER PROGRAM

Matsumoto Toshiyuki; Yakabe Masami

Archive | 2007

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, MANUFACTURING METHOD PROGRAM OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS

Ikeuchi Naoki; Yakabe Masami

Archive | 2006

APPARATUS AND METHOD FOR INSPECTING MINUTE STRUCTURE

Okumura Katsuya; Yakabe Masami; Matsumoto Toshiyuki; Ikeuchi Naoki

Archive | 2006

INSPECTION DEVICE OF MICRO STRUCTURE, INSPECTION METHOD OF MICRO STRUCTURE AND INSPECTION PROGRAM OF MICROSTRUCTURE

Okumura Katsuya; Matsumoto Toshiyuki; Ikeuchi Naoki; Yakabe Masami

Archive | 2007

TEST EQUIPMENT FOR MICROSTRUCTURE, AND INSPECTION METHOD OF MICROSTRUCTURE

Okumura Katsuya; Ikeuchi Naoki; Yakabe Masami; Kamigoori Akiko

Archive | 2007

Apparatus and method for inspecting fine structure and inspection program

Yakabe Masami; Ikeuchi Naoki

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Collaboration

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Matsumoto Toshiyuki

Tokyo Electron

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Hirota Yoshihiro

Tokyo Electron

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