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Hisashi Masumura

East Tennessee State University

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Publication

Featured researches published by Hisashi Masumura.

Archive | 1997

Method of manufacturing semiconductor wafers

Tadahiro Kato; Hisashi Masumura; Sadayuki Okuni; Hideo Kudo

Archive | 1996

Method of manufacturing semiconductor mirror wafers

Hisashi Masumura; Kiyoshi Suzuki; Hideo Kudo

Archive | 2001

Wafer manufacturing method, polishing apparatus, and wafer

Shigeyoshi Netsu; Hisashi Masumura

Archive | 1998

Carrier for double-side polishing

Hisashi Masumura; Kiyoshi Suzuki

Archive | 1994

Method of making semiconductor wafers

Tadahiro Kato; Masami Nakano; Sunao Shima; Hisashi Masumura

Archive | 1997

Method of polishing semiconductor wafers

Tadahiro Kato; Hisashi Masumura; Masami Nakano; Hideo Kudo

Archive | 1999

Automatic workpiece transport apparatus for double-side polishing machine

Hisashi Masumura; Kiyoshi Suzuki; Noboru Tamai; Syunichi Ogasawara

Archive | 1995

Polishing agent used for polishing silicon wafers and polishing method using the same

Hisashi Masumura; Kiyoshi Suzuki; Hideo Kudo; Teruaki Fukami

Archive | 1994

Method for production of wafer

Tadahiro Kato; Sunao Shima; Masami Nakano; Hisashi Masumura; Hideo Kudo

Archive | 1996

Apparatus and method for double-sided polishing semiconductor wafers

Hisashi Masumura; Kiyoshi Suzuki; Hideo Kudo

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Collaboration

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Hideo Kudo

East Tennessee State University

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Satoru Arakawa

East Tennessee State University

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Tadahiro Kato

East Tennessee State University

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Hiromi Kishida

East Tennessee State University

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Kiyoshi Suzuki

East Tennessee State University

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Koji Kitagawa

East Tennessee State University

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Hiromasa Hashimoto

East Tennessee State University

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Kouji Morita

East Tennessee State University

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Fumio Suzuki

University of Wisconsin-Madison

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Masami Nakano

East Tennessee State University

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