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Kouji Morita

East Tennessee State University

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Publication

Featured researches published by Kouji Morita.

Archive | 2007

Polishing head and polishing apparatus

Hisashi Masumura; Koji Kitagawa; Kouji Morita; Hiromi Kishida; Satoru Arakawa

Archive | 1996

Process of polishing wafers

Toshihiro Tsuchiya; Kouichi Tanaka; Kiromasa Hashimoto; Kouji Morita; Tsutomu Takaku

Archive | 1995

Polishing method and apparatus for automatic reduction of wafer taper in single-wafer polishing

Hitoshi Misaka; Kouichi Tanaka; Morifumi Matsumoto; Kouji Morita

Archive | 1996

Process of polishing silicon wafers

Toshihiro Tsuchiya; Kouichi Tanaka; Hiromasa Hashimoto; Kouji Morita; Tsutomu Takaku

Archive | 2008

Work polishing head, and polishing apparatus having the polishing head

Hisashi Masumura; Kouji Morita; Hiromasa Hashimoto; Satoru Arakawa; Hiromi Kishida

Archive | 2007

Polishing head, polishing apparatus and method for demounting workpiece

Hisashi Masumura; Koji Kitagawa; Kouji Morita; Hiromi Kishida; Satoru Arakawa

Archive | 2008

POLISHING HEAD AND POLISHING APPARATUS HAVING THE SAME

Hisashi Masumura; Kouji Morita; Hiromasa Hashimoto; Satoru Arakawa; Hiromi Kishida

Archive | 2007

Polishing head, polishing apparatus and work removing method

Hisashi Masumura; Koji Kitagawa; Kouji Morita; Hiromi Kishida; Satoru Arakawa

Archive | 2011

METHOD FOR MANUFACTURING POLISHING HEAD AND POLISHING APPARATUS

Hisashi Masumura; Hiromasa Hashimoto; Kouji Morita; Hiromi Kishida; Satoru Arakawa

Archive | 2010

Polierkopf und diesen aufweisende Poliervorrichtung

Hisashi Masumura; Kouji Morita; Hiromasa Hashimoto; Satoru Arakawa; Hiromi Kishida

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Collaboration

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Hiromi Kishida

East Tennessee State University

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Satoru Arakawa

East Tennessee State University

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Hisashi Masumura

East Tennessee State University

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Koji Kitagawa

East Tennessee State University

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Hiromasa Hashimoto

East Tennessee State University

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Kouichi Tanaka

East Tennessee State University

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Hitoshi Misaka

East Tennessee State University

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Morifumi Matsumoto

East Tennessee State University

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Toshihiro Tsuchiya

East Tennessee State University

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Tsutomu Takaku

East Tennessee State University

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