Ho Soo Park

Hybrid Bulk Acoustic Wave Structure for Temperature Stability in LTE Applications

A novel structure of hybrid bulk acoustic wave (BAW) resonator with low temperature coefficient of frequency (TCF) is presented. Implemented with a pair of quarter-wave reflectors on air-cavity reflector, the hybrid BAW resonator exhibits a TCF of as low as -11.5 ppm/°C and an effective electro-mechanical coupling coefficient (kt2) of 5.1% at the frequency of 2.5 GHz. The hybrid BAW resonator also shows excellent Q-factors of 1627 and 1842 at resonance and anti-resonance frequency, respectively. RF duplexer configured with the hybrid BAW resonators is provided as well. The fabricated RF duplexer for long term evolution (LTE) band-7, which should be designed to prevent the co-existence problem with WiFi having extremely narrow fractional band-gap of 0.7%, achieves an attenuation of 36.8 dB and an insertion loss of 2.4 dB.

Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt), which is essential to achieve wide band-width of RF filters, is 6.54%.