Hoc Khiem Trieu

Label-free photonic biosensors fabricated with low-loss hydrogenated amorphous silicon resonators

Abstract. The precise detection of chemicals and biomolecules is of great interest in the areas of biotechnology and medical diagnostics. Thus, there is a need for highly sensitive, small area, and low-cost sensors. We fabricated and optically characterized hydrogenated amorphous silicon photonic resonators for label-free lab-on-chip biosensors. The sensing was performed with small-footprint microdisk and microring resonators that detect a refractive-index change via the evanescent electric field. Homogeneous sensing with NaCl and surface-sensing experiments with immobilized bovine serum albumin (BSA) were carried out. A sensitivity as high as 460  nm/RIU was measured for NaCl dissolved in deionized water for the disk, whereas about 50  nm/RIU was determined for the ring resonator. The intrinsic limits of detection were calculated to be 3.3×10−4 and 3.2×10−3 at 1550-nm wavelength. We measured the binding of BSA to functionalized ring resonators and found that molecular masses can be detected down to the clinically relevant femtogram regime. The detection and quantification of related analytes with hydrogenated amorphous silicon photonic sensors can be used in medical healthcare diagnostics like point-of-care-testing and biotechnological screening.

Hydrogenated amorphous silicon photonic device trimming by UV-irradiation

A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for wafer-scale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20 pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation.

Visualization of Multimerization and Self-Assembly of DNA-Functionalized Gold Nanoparticles Using In-Liquid Transmission Electron Microscopy

Base-pairing stability in DNA-gold nanoparticle (DNA-AuNP) multimers along with their dynamics under different electron beam intensities was investigated with in-liquid transmission electron microscopy (in-liquid TEM). Multimer formation was triggered by hybridization of DNA oligonucleotides to another DNA strand (Hyb-DNA) related to the concept of DNA origami. We analyzed the degree of multimer formation for a number of samples and a series of control samples to determine the specificity of the multimerization during the TEM imaging. DNA-AuNPs with Hyb-DNA showed an interactive motion and assembly into 1D structures once the electron beam intensity exceeds a threshold value. This behavior was in contrast with control studies with noncomplementary DNA linkers where statistically significantly reduced multimerization was observed and for suspensions of citrate-stabilized AuNPs without DNA, where we did not observe any significant motion or aggregation. These findings indicate that DNA base-pairing interactions are the driving force for multimerization and suggest a high stability of the DNA base pairing even under electron exposure.

Miniaturized Transmission-Line Sensor for Broadband Dielectric Characterization of Biological Liquids and Cell Suspensions

The nondestructive characterization of biological liquids and cell suspensions using electromagnetic waves in the microwave frequency range calls for accurate and sensitive measurement devices. Especially when reducing the sample volume, the sensitivity becomes a critical design parameter for broadband sensors. In this paper, a miniaturized transmission-line sensor based on a coplanar waveguide is used to characterize the permittivity of nanoliter volumes of biologically relevant liquids and cell suspensions. The sensors sensitivity is increased by means of electrically small discontinuities within the sensing section. The biological samples are guided across the sensor in a microfluidic channel, which is fabricated using microsystems technology. The sensor is used between 850 MHz and 40 GHz to detect the broadband permittivity of liquid samples such as aqueous salt and protein solutions. The experimentally detected contrast between living and dead Chinese hamster ovary cells in suspension is significant despite the small sample volume.

Athermal and wavelength-trimmable photonic filters based on TiO₂-cladded amorphous-SOI.

Large-scale integrated silicon photonic circuits suffer from two inevitable issues that boost the overall power consumption. First, fabrication imperfections even on sub-nm scale result in spectral device non-uniformity that require fine-tuning during device operation. Second, the photonic devices need to be actively corrected to compensate thermal drifts. As a result significant amount of power is wasted if no athermal and wavelength-trimmable solutions are utilized. Consequently, in order to minimize the total power requirement of photonic circuits in a passive way, trimming methods are required to correct the device inhomogeneities from manufacturing and athermal solutions are essential to oppose temperature fluctuations of the passive/active components during run-time. We present an approach to fabricate CMOS backend-compatible and athermal passive photonic filters that can be corrected for fabrication inhomogeneities by UV-trimming based on low-loss amorphous-SOI waveguides with TiO2 cladding. The trimming of highly confined 10 μm ring resonators is proven over a free spectral range retaining athermal operation. The athermal functionality of 2nd-order 5 μm add/drop microrings is demonstrated over 40°C covering a broad wavelength interval of 60 nm.

An injectable alginate-based hydrogel for microfluidic applications

The objective of this study was to develop an injectable alginate based formulation for immobilizing enzymes into microfluidic systems. The gelation was induced upon lowering the pH by addition of d-glucono-δ-lactone (GDL) and release of Ca+ ions from solid CaCO3. The effects of GDL concentration on enzymatic activity and gelation time were investigated. The results indicated that increasing the GDL concentration increased both surface area and enzymatic activity. Also, chitosan was added to the formulation at different ratios to enhance the stability of enzyme during immobilization. For microfluidic application, 100μl spiral coil single channel microchip was fabricated and alginate GDL mixture containing β-glucosidase was injected to the microchannel prior to gelation. Enzymatic conversion was performed by pumping substrate (pNPG) through the microchannel. The results indicated that the entire substrate was converted continuously during 24h without any leakage or deactivation of immobilized enzyme.

Photonic integrated circuit components based on amorphous silicon-on-insulator technology

We present integrated-optic building blocks and functional photonic devices based on amorphous silicon-on-insulator technology. Efficient deep-etched fiber-to-chip grating couplers, low-loss single-mode photonic wire waveguides, and compact power splitters are presented. Based on the sub-μm photonic wires, 2×2 Mach–Zehnder interferometers and add/drop microring resonators (MRRs) with low device footprints and high finesse up to 200 were realized and studied. Compact polarization rotators and splitters with ≥10  dB polarization extinction ratio were fabricated for the polarization management on-chip. The tuning and trimming capabilities of the material platform are demonstrated with efficient microheaters and a permanent device trimming method, which enabled the realization of energy-efficient photonic circuits. Wavelength multiplexers in the form of cascaded filter banks and 4×4 routers based on MRR switches are presented. Fabrication imperfections were analyzed and permanently corrected by an accurate laser-trimming method, thus enabling eight-channel multiplexers with record low metrics of sub-mW static power consumption and ≤1°C temperature overhead. The high quality of the functional devices, the high tuning efficiency, and the excellent trimming capabilities demonstrate the potential to realize low-cost, densely integrated, and ultralow-power 3D-stacked photonic circuits on top of CMOS microelectronics.

Energy-Efficient Wavelength Multiplexers Based on Hydrogenated Amorphous Silicon Resonators

Optical multiplexers are key components of modern data transmission systems that have evolved from long-haul fiber communication applications down to the photonic interconnect level on-chip, which demand high bandwidths and low-power photonic links with small footprint. We present compact, energy-efficient, and high-bandwidth optical add/drop multiplexers that are based on complementary metal-oxide-semiconductor (CMOS) backend-compatible hydrogenated amorphous silicon microring resonators. We study the manufacturing nonuniformity of the as-fabricated devices and analyze the static power consumption that is required to actively align the multiplexers to a 100-GHz grid by using state-of-the-art microheaters. The microring filter banks are in excellent agreement with the design and satisfy a good tradeoff between concurrent properties of high-data-rate capability, low filter loss, high channel isolation, and manufacturing uniformity, which facilitates the operation with low static power consumption. In addition, we demonstrate that it is possible to permanently correct the unavoidable fabrication imperfections and to arrange the individual wavelength channels by a postfabrication trimming method so that the static power is reduced by more than an order of magnitude and allows minimization of these parts of the overall power requirements of such photonic integrated circuits down to record low metrics of a few femtojoules per bit.

Spatially resolved in situ determination of reaction progress using microfluidic systems and FT-IR spectroscopy as a tool for biocatalytic process development

A concept for the determination of concentrations in microchannels using FT-IR spectroscopy in transmission is presented. The fundamental idea of spatially resolved measurements along several measuring points was implemented in a single-channel microreactor. Compared to existing microreactor setups for the analysis of fast chemical reactions or mixing processes, the presented concept enables longer residence times at appropriate resolution. Once steady-state conditions were reached in the reactor, mid-infrared spectra were collected at different locations. Information throughout the considered conversion range is available, which is of great importance to analyze inhibitory effects, next to the kinetic constants (vmax and KM). Therefore, this technology enables a rapid screening of (bio-)catalysts, substrate specificity and process conditions. In particular, the analysis of real substrates instead of model substrates and the possibility to follow side reactions and follow-up reactions during enzymatic catalysis open a broad field of application.

Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOS-compatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20 dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented.