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Hochberg Arthur Kenneth

Air Products & Chemicals

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Publication

Featured researches published by Hochberg Arthur Kenneth.

Archive | 2000

GROWTH OF OXYGEN-CONTAINING SILICON COMPOUND FILM

Laxman Ravi Kumar; Roberts David A; Hochberg Arthur Kenneth

Archive | 2005

METHOD FOR SUPPLYING PRECURSOR SUBSTANCE AND CONTAINER

Birtcher Charles Michael; Dunning Richard J; Clark Robert Daniel; Hochberg Arthur Kenneth; Steidl Thomas Andrew

Archive | 2002

METHOD OF DEPOSITING METAL OXIDE AND METALLOID OXIDE HAVING COMPOSITIONAL GRADIENT AND NITRIDE

Senzaki Yoshihide; Hochberg Arthur Kenneth; Norman John A T

Archive | 2007

DIETHYL SILANE AS SILICON SOURCE FOR METAL SILICATE FILM DEPOSITION

Clark Robert Daniel; Cuthill Kirk Scott; Thridandam Hareesh; Hochberg Arthur Kenneth

Archive | 2009

Herstellung von Metall-Siliziumnitridfilmen mittels zyklischer Abscheidung

Lei Xinjian; Thridandam Hareesh; Cuthill Kirk Scott; Hochberg Arthur Kenneth

Archive | 2008

Diethylsilane as a silicon source in the depositon of metal silicate films

Clark Robert Daniel; Cuthill Kirk Scott; Thridandam Hareesh; Hochberg Arthur Kenneth

Archive | 2006

ABSCHEIDUNG UND THERMISCHE BEHANDLUNG VON DÜNNEN SCHICHTEN AUS MEHRKOMPONENTENOXYDEN VON TYP ZRSNTI UND HFSNTI UNTER VERWENDUNG EINES FLÜSSIGEN LÖSUNGSMITTELFREIEN VORLÄUFERGEMISCH

Senzaki Yoshihide; Hochberg Arthur Kenneth; Roberts David Allen; Norman John Anthony Thomas; Fleming Robert Mclemore; Alers Glenn Baldwin

Archive | 2005

CVD-Abscheidung von Hf und Zr enthaltenden Oxinitride Filmen

Loftin John D; Clark Robert Daniel; Hochberg Arthur Kenneth

Archive | 2004

Vorrichtung und Verfahren zum Abgeben von Vorläufermaterial

Birtcher Charles Michael; Dunning Richard J; Clark Robert Daniel; Hochberg Arthur Kenneth; Steidl Thomas Andrew

Archive | 2002

Processes for the deposition of silicon dioxide, silicon oxynitride and silicon nitride using bis(tertiarybutylamino)silane

Laxman Ravi Kumar; Roberts David Allen; Hochberg Arthur Kenneth

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Collaboration

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Clark Robert Daniel

Air Products

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Roberts David Allen

Air Products

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Cuthill Kirk Scott

Air Products

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Laxman Ravi Kumar

Air Products

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Thridandam Hareesh

Air Products

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Norman John Anthony Thomas

Air Products

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Senzaki Yoshihide

Air Products

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Alers Glenn Baldwin

Air Products

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Fleming Robert Mclemore

Air Products

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Lei Xinjian

Air Products

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