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Roberts David Allen

Air Products & Chemicals

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Publication

Featured researches published by Roberts David Allen.

Archive | 1993

Cleaning agents used during the fabrication of integrated circuits and associated process.

Roberts David Allen; Ivankovits John Christopher; Bohling David Arthur

Archive | 2000

Method and composition for growing polyphyletic metallic or metallic compound layer

Senzaki Yoshihide; Roberts David Allen; Norman John Anthony Thomas

Archive | 2003

METHOD FOR REMOVING GROUP IVb AND Vb METAL IMPURITIES FROM GROUP IVb METAL TETRAHALIDE

Bowen Heather Regina; Roberts David Allen

Archive | 2003

METHOD FOR REMOVING beta-DIKETONE BY-PRODUCT

Zorich Robert Sam; Thurmond James Richard; Roberts David Allen

Archive | 2006

Verwendung von Wasser und angesäuertem Wasser zur Reinigung flüssiger MOCVD Vorläuferverbindungen

Zorich Robert Sam; Thurmond James Richard; Roberts David Allen

Archive | 2006

ABSCHEIDUNG UND THERMISCHE BEHANDLUNG VON DÜNNEN SCHICHTEN AUS MEHRKOMPONENTENOXYDEN VON TYP ZRSNTI UND HFSNTI UNTER VERWENDUNG EINES FLÜSSIGEN LÖSUNGSMITTELFREIEN VORLÄUFERGEMISCH

Senzaki Yoshihide; Hochberg Arthur Kenneth; Roberts David Allen; Norman John Anthony Thomas; Fleming Robert Mclemore; Alers Glenn Baldwin

Archive | 2006

REINIGUNG VON HALOGENIDEN DER GRUPPE IVB

Bowen Heather Regina; Roberts David Allen

Archive | 2004

PROCESS FOR ATOMIC LAYER DEPOSITION OF METAL FILMS SUCH AS COPPER OR COPPER CONTAINING FILM

Norman John Anthony Thomas; Roberts David Allen; Boze Melanie Anne

Archive | 2003

Herstellung von Metallkomplexen durch Komproportionierung

Norman John Anthony Thomas; Senzaki Yoshihide; Roberts David Allen

Archive | 2002

Processes for the deposition of silicon dioxide, silicon oxynitride and silicon nitride using bis(tertiarybutylamino)silane

Laxman Ravi Kumar; Roberts David Allen; Hochberg Arthur Kenneth

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Collaboration

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Hochberg Arthur Kenneth

Air Products

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Norman John Anthony Thomas

Air Products

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Bohling David Arthur

Air Products

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Ivankovits John Christopher

Air Products

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Senzaki Yoshihide

Air Products

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Bowen Heather Regina

Air Products

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Laxman Ravi Kumar

Air Products

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Thurmond James Richard

Air Products

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Zorich Robert Sam

Air Products

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Alers Glenn Baldwin

Air Products

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