Hoe Joon Kim

Parallelization of thermochemical nanolithography

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Three-Dimensional Integration of Graphene via Swelling, Shrinking, and Adaptation

The transfer of graphene from its growth substrate to a target substrate has been widely investigated for its decisive role in subsequent device integration and performance. Thus far, various reported methods of graphene transfer have been mostly limited to planar or curvilinear surfaces due to the challenges associated with fractures from local stress during transfer onto three-dimensional (3D) microstructured surfaces. Here, we report a robust approach to integrate graphene onto 3D microstructured surfaces while maintaining the structural integrity of graphene, where the out-of-plane dimensions of the 3D features vary from 3.5 to 50 μm. We utilized three sequential steps: (1) substrate swelling, (2) shrinking, and (3) adaptation, in order to achieve damage-free, large area integration of graphene on 3D microstructures. Detailed scanning electron microscopy, atomic force microscopy, Raman spectroscopy, and electrical resistance measurement studies show that the amount of substrate swelling as well as the flexural rigidities of the transfer film affect the integration yield and quality of the integrated graphene. We also demonstrate the versatility of our approach by extension to a variety of 3D microstructured geometries. Lastly, we show the integration of hybrid structures of graphene decorated with gold nanoparticles onto 3D microstructure substrates, demonstrating the compatibility of our integration method with other hybrid nanomaterials. We believe that the versatile, damage-free integration method based on swelling, shrinking, and adaptation will pave the way for 3D integration of two-dimensional (2D) materials and expand potential applications of graphene and 2D materials in the future.

Parallel nanoimaging and nanolithography using a heated microcantilever array

We report parallel topographic imaging and nanolithography using heated microcantilever arrays integrated into a commercial atomic force microscope (AFM). The array has five AFM cantilevers, each of which has an internal resistive heater. The temperatures of the cantilever heaters can be monitored and controlled independently and in parallel. We perform parallel AFM imaging of a region of size 550 μm × 90 μm, where the cantilever heat flow signals provide a measure of the nanometer-scale substrate topography. At a cantilever scan speed of 1134 μm s(-1), we acquire a 3.1 million-pixel image in 62 s with noise-limited vertical resolution of 0.6 nm and pixels of size 351 nm × 45 nm. At a scan speed of 4030 μm s(-1) we acquire a 26.4 million pixel image in 124 s with vertical resolution of 5.4 nm and pixels of size 44 nm × 43 nm. Finally, we demonstrate parallel nanolithography with the cantilever array, including iterations of measure-write-measure nanofabrication, with each cantilever operating independently.

Thermal crosstalk in heated microcantilever arrays

We report on a detailed characterization and analysis of thermal crosstalk in a heated microcantilever array. The fabricated heated cantilever array consists of five identical independently controlled heated cantilevers. The temperature of each cantilever can be controlled over a large temperature range, up to 900 °C, by means of an integrated solid-state resistive heater. We analyze thermal crosstalk in steady and transient operating conditions when the heated cantilever array is either in contact with a substrate or freely suspended in air. The thermal conductance between neighboring cantilevers is as high as 0.61 µW °C−1, resulting in non-negligible temperature increases in neighboring cantilevers, depending upon the operating conditions. By understanding and accounting for thermal crosstalk, it is possible to improve temperature control and temperature measurements with heated microcantilever arrays.

Tip-Based Nanofabrication for Scalable Manufacturing

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.

Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever

We report a wear-resistant ultrananocrystalline (UNCD) diamond tip integrated onto a heated atomic force microscope (AFM) cantilever and UNCD tips integrated into arrays of heated AFM cantilevers. The UNCD tips are batch-fabricated and have apex radii of approximately 10 nm and heights up to 7 μm. The solid-state heater can reach temperatures above 600 °C and is also a resistive temperature sensor. The tips were shown to be wear resistant throughout 1.2 m of scanning on a single-crystal silicon grating at a force of 200 nN and a speed of 10 μm s(-1). Under the same conditions, a silicon tip was completely blunted. We demonstrate the use of these heated cantilevers for thermal imaging in both contact mode and intermittent contact mode, with a vertical imaging resolution of 1.9 nm. The potential application to nanolithography was also demonstrated, as the tip wrote hundreds of polyethylene nanostructures.

Parallel nanoimaging using an array of 30 heated microcantilevers

A key limitation of atomic force microscopy (AFM) is the size of the measurement area and the speed with which this area can be measured. Cantilever arrays have the potential to increase the measurement area and speed compared to single cantilevers, although the integration and use of cantilever arrays is still not widespread. We report integration of an array of 30 individually addressable cantilevers into a commercial AFM. Each cantilever has an integrated resistive heater-thermometer that can measure nanometer-scale topography by tracking the cantilever heat flow. Parallel imaging with this AFM array can acquire an image of size 0.510 mm × 0.425 mm, much larger than typical AFM images. We acquired a 9.05 million-pixel image in 256 seconds at a cantilever scan speed of 226 μm s−1 with noise-limited vertical resolution of 1.21 nm and pixels of size 72.15 nm × 351.5 nm. This throughput is more than two orders of magnitude larger than conventional AFM measurements.

Direct measurements of irradiation-induced creep in micropillars of amorphous Cu56Ti38Ag6, Zr52Ni48, Si, and SiO2

We report in situ measurements of irradiation-induced creep on amorphous (a-) Cu56Ti38Ag6, Zr52Ni48, Si, and SiO2. Micropillars 1 μm in diameter and 2 μm in height were irradiated with ∼2 MeV heavy ions during uniaxial compression at room temperature. The creep measurements were performed using a custom mechanical testing apparatus utilizing a nanopositioner, a silicon beam transducer, and an interferometric laser displacement sensor. We observed Newtonian flow in all tested materials. For a-Cu56Ti38Ag6, a-Zr52Ni48, a-Si, and Kr+ irradiated a-SiO2 irradiation-induced fluidities were found to be nearly the same, ≈3 GPa−1 dpa−1, whereas for Ne+ irradiated a-SiO2 the fluidity was much higher, 83 GPa−1 dpa−1. A fluidity of 3 GPa−1 dpa−1 can be explained by point-defect mediated plastic flow induced by nuclear collisions. The fluidity of a-SiO2 can also be explained by this model when nuclear stopping dominates the energy loss, but when the electronic stopping exceeds 1 keV/nm, stress relaxation in thermal spi...

Measuring temperature dependent viscosity of liquids using an atomic force microscope cantilever with a solid state heating element

This paper presents a study on the dynamic response of an atomic force microscope (AFM) cantilever with a solid state heating element in liquid and its application for measuring the temperature-dependent viscosity of liquids. A finite difference model (FDM) predicts the frequency response of a heated cantilever immersed in liquid and calibrates the liquid viscosity from the measured cantilever resonant frequency (f0) at different cantilever heater temperatures. The technique measures a wide range of liquid viscosities (0.0005-0.005 kgm-1s-1) at temperatures ranging from 20 to 55 °C with high sensitivity (7.1 × 10-7 kgm-1s-1/Hz for 50 wt% ethylene glycol/water). The measurement requires heating a liquid volume of about 10 nl, which is more than 1000X smaller than other microcantilever-based viscosity measurements.

Batch Fabrication of Transfer-Free Graphene-Coated Microcantilevers

This letter reports a method for transfer-free graphene growth and its application to batch fabrication of graphene-coated microcantilevers. Transfer-free graphene was synthesized directly on insulating substrates from solid carbon sources of poly(methyl methacrylate) or amorphous carbon. The graphene thickness and quality were controlled by optimizing the amount of solid carbon source, annealing temperature, and growth time. This synthesis method was then used to fabricate more than 100 graphene-coated cantilevers on a silicon substrate of size 2 cm × 2.5 cm. More than 90% of the cantilever surface was coated with high-quality multilayer graphene, and the overall device yield was ~75%.