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Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Holger Hoefer is active.

Publication


Featured researches published by Holger Hoefer.


Archive | 2006

Method for sealing an opening

Udo Bischof; Holger Hoefer; Volker Schmitz; Axel Grosse; Lutz Mueller; Ralf Hausner


Archive | 2005

Microstructured Infrared Sensor

Jochen Franz; Frank Reichenbach; Dieter Maurer; Holger Hoefer; Mark-Alexander Schweiker


Archive | 2004

Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device

Frank Henning; Lutz Mueller; Holger Hoefer; Arnd Kaelberer


Archive | 2005

Getter layer for use in IR sensor is installed on inside surface of sensor cap, and has gap through which IR passes to absorber and signal-generating layer

Frank Reichenbach; Ralf Hausner; Holger Hoefer; Hans-Peter Baer


Archive | 2013

Damping device for a micromechanical sensor device

Holger Hoefer; Ricardo Ehrenpfordt; Klaus Offterdinger; Christian Solf


Archive | 2007

Verfahren zum Verschließen einer Öffnung

Lutz Mueller; Ralf Hausner; Holger Hoefer; Udo Bischof; Volker Schmitz; Axel Grosse


Archive | 2013

Dämpfungsvorrichtung für eine mikromechanische Sensoreinrichtung

Holger Hoefer; Christian Solf; Ricardo Ehrenpfordt; Klaus Offterdinger


Archive | 2010

Sensor device for use with a housing, has housing base body with contact elements, elastic base part connected with housing base body and chip structure arranged on base part

Holger Hoefer; Thomas Klaus


Archive | 2003

Ceramic substrate and method of manufacturing same

Anja Neubert; Holger Hoefer


Archive | 2001

Method for processing substrates

Stefan Pinter; Holger Hoefer

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