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Holger Tuitje

Tokyo Electron

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Publication

Featured researches published by Holger Tuitje.

Archive | 2009

CALIBRATION METHOD FOR OPTICAL METROLOGY

Fred Stanke; Adam Norton; Holger Tuitje

Archive | 2006

Method and apparatus for position-dependent optical metrology calibration

Abdurrahman Sezginer; Kenneth Johnson; Adam Norton; Holger Tuitje

Archive | 2009

Diffraction order sorting filter for optical metrology

Adam Norton; Holger Tuitje; Fred Stanke

Archive | 2006

Matching optical metrology tools using diffraction signals

Fred Stanke; Holger Tuitje; Shigeru Nagano

Archive | 2006

Drift compensation for an optical metrology tool

Vuong Vi; Yan Chen; Holger Tuitje

Archive | 2006

Matching optical metrology tools using spectra enhancement

Vuong Vi; Yan Chen; Holger Tuitje

Archive | 2006

Matching optical metrology tools using hypothetical profiles

Fred Stanke; Holger Tuitje; Shigeru Nagano

Archive | 2014

Differential acoustic time of flight measurement of temperature of semiconductor substrates

Jun Pei; Junwei Bao; Holger Tuitje; Ching-Ling Meng; Mihail Mihaylov

Archive | 2014

Spatially resolved optical emission spectroscopy (oes) in plasma processing

Junwei Bao; Ching-Ling Meng; Holger Tuitje; Mihail Mihaylov; Yan Chen; Zheng Yan; Haixing Zou; Hanyou Chu

Archive | 2013

System for in-situ film stack measurement during etching and etch control method

Shifang Li; Junwei Bao; Hanyou Chu; Wen Jin; Ching-Ling Meng; Weiwen Xu; Ping Wang; Holger Tuitje; Mihail Mihaylov; Xinkang Tian

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Collaboration

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Fred Stanke

Tokyo Electron

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Abdurrahman Sezginer

Tokyo Electron

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Adam Norton

Tokyo Electron

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Ching-Ling Meng

Tokyo Electron

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Junwei Bao

Tokyo Electron

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Mihail Mihaylov

Tokyo Electron

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Yan Chen

Tokyo Electron

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Hanyou Chu

Tokyo Electron

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Shigeru Nagano

Tokyo Electron

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Vuong Vi

Tokyo Electron

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