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Junwei Bao

Tokyo Electron

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Publication

Featured researches published by Junwei Bao.

Archive | 2005

Optical metrology model optimization for repetitive structures

Shifang Li; Junwei Bao; Hong Qui; Victor Liu

Archive | 2003

Parametric optimization of optical metrology model

Junwei Bao; Vuong Vi; Manuel Madriaga; Daniel Prager

Archive | 2006

Weighting function to enhance measured diffraction signals in optical metrology

Vuong Vi; Junwei Bao; Shifang Li; Yan Chen

Archive | 2008

Controlling a fabrication tool using support vector machine

Wen Jin; Junwei Bao; Shifang Li; Manuel Madriaga

Archive | 2007

Automated process control using optical metrology and a correlation between profile models and key profile shape variables

Jeffrey Alexander Chard; Junwei Bao; Manuel Madriaga

Archive | 2006

Generating a profile model to characterize a structure to be examined using optical metrology

Jeffrey Alexander Chard; Junwei Bao; Joerg Bischoff; Shifang Li; Wei Liu; Hong Qiu; Sylvio Rabello; Vuong Vi

Archive | 2006

Data flow management in generating profile models used in optical metrology

Hong Qiu; Junwei Bao; Wei Liu; Jeffrey Alexander Chard; Miao Liu; Gang He; Hemalatha Erva; Vuong Vi

Archive | 2007

Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables

Jeffrey Alexander Chard; Junwei Bao

Archive | 2006

Allocating processing units to generate simulated diffraction signals used in optical metrology

Hemalatha Erva; Hong Qiu; Junwei Bao; Vuong Vi

Archive | 2006

Optical metrology of a structure formed on a semiconductor wafer using optical pulses

Joerg Bischoff; Junwei Bao

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Collaboration

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Jeffrey Alexander Chard

Tokyo Electron

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Hong Qiu

Tokyo Electron

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Vuong Vi

Tokyo Electron

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Wei Liu

Tokyo Electron

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Ching-Ling Meng

Tokyo Electron

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Hemalatha Erva

Tokyo Electron

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Holger Tuitje

Tokyo Electron

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Mihail Mihaylov

Tokyo Electron

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Shifang Li

Tokyo Electron

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Gang He

Tokyo Electron

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