Junwei Bao

Optical metrology model optimization for repetitive structures

Parametric optimization of optical metrology model

Weighting function to enhance measured diffraction signals in optical metrology

Controlling a fabrication tool using support vector machine

Automated process control using optical metrology and a correlation between profile models and key profile shape variables

Generating a profile model to characterize a structure to be examined using optical metrology

Data flow management in generating profile models used in optical metrology

Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables

Allocating processing units to generate simulated diffraction signals used in optical metrology

Optical metrology of a structure formed on a semiconductor wafer using optical pulses