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Holz Markus

Carl Zeiss AG

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Publication

Featured researches published by Holz Markus.

Archive | 2017

Vorrichtung zur Messung einer Ausrichtung eines Moduls

Bihr Ulrich; Holz Markus; Hauf Markus

Archive | 2017

특히 마이크로리소그래픽 투영 노광 장치의 광학 시스템의 조립체

Horn Jan; Solaiman Mostafa; Sigel Benjamin; Knauf Benedikt; Krone Stefan; Specht Joerg; Holz Markus; Bleidistel Sascha; Bart Florian

Archive | 2017

LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS

Dinger Udo; Holz Markus; Bihr Ulrich

Archive | 2017

Anlage und Verfahren zum Betreiben einer Anlage

Holz Markus; Bihr Ulrich

Archive | 2017

Sensoranordnung für eine Lithographieanlage, Lithographieanlage und Verfahren zum Betreiben einer Lithographieanlage

Bihr Ulrich; Holz Markus; Horn Jan

Archive | 2017

LITHOGRAPHIEANLAGE UND VERFAHREN ZUM BETREIBEN EINER LITHOGRAPHIEANLAGE

Dinger Udo; Holz Markus; Bihr Ulrich

Archive | 2016

DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LITHOGRAPHY SYSTEM, AND METHOD

Horn Jan; Holz Markus; Specht Joerg

Archive | 2016

Baugruppe eines optischen Systems, insbesondere einer mikrolithographischen Projektionsbelichtungsanlage

Horn Jan; Sigel Benjamin; Knauf Benedikt; Krone Stefan; Specht Jörg; Holz Markus; Lindner Ralf

Archive | 2016

Assembly of an optical system, in particular of a microlithographic projection exposure apparatus

Horn Jan; Sigel Benjamin; Knauf Benedikt; Krone Stefan; Specht Jörg; Holz Markus; Lindner Ralf; Bleidistel Sascha; Bart Florian

Archive | 2014

Verschluss zum Verschließen eines Behälters und zur Übertragung von Signalen

Holz Markus; Specht Jörg; Sigel Benjamin; Horn Jan

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Collaboration

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Horn Jan

Carl Zeiss AG

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Bihr Ulrich

Carl Zeiss AG

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Sigel Benjamin

Carl Zeiss AG

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Knauf Benedikt

Carl Zeiss AG

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Krone Stefan

Carl Zeiss AG

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Specht Jörg

Carl Zeiss AG

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Dinger Udo

Carl Zeiss AG

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Lindner Ralf

Carl Zeiss AG

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Specht Joerg

Carl Zeiss AG

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