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Hongyu Yue

Tokyo Electron

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Publication

Featured researches published by Hongyu Yue.

Archive | 2008

DIELECTRIC MATERIAL TREATMENT SYSTEM AND METHOD OF OPERATING

Junjun Liu; Jacques Faguet; Eric M. Lee; Dorel I. Toma; Hongyu Yue

Archive | 2012

ANNEALING METHOD AND ANNEALING APPARATUS

Yusaku Izawa; Junjun Liu; Hongyu Yue; Dorel I. Toma

Archive | 2008

Dielectric treatment platform for dielectric film deposition and curing

Junjun Liu; Jacques Faguet; Eric M. Lee; Dorel I. Toma; Hongyu Yue

Archive | 2011

Method for cleaning low-k dielectrics

Junjun Liu; Dorel I. Toma; Hongyu Yue

Archive | 2009

Dielectric material treatment saystem and method of operating

Junjun Liu; Jacques Faguet; Eric M. Lee; Dorel I. Toma; Hongyu Yue

Archive | 2008

Dielectric treatment module using scanning ir radiation source

Junjun Liu; Jacques Faguet; Eric M. Lee; Dorel I. Toma; Hongyu Yue

Archive | 2008

IR LASER OPTICS SYSTEM FOR DIELECTRIC TREATMENT MODULE

Junjun Liu; Jacques Faguet; Eric M. Lee; Dorel I. Toma; Hongyu Yue

Archive | 2011

Method for integrating low-k dielectrics

Junjun Liu; Dorel I. Toma; Hongyu Yue

Archive | 2012

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION BY AN ELECTRIC FIELD

Jozef Brcka; Jacques Faguet; Eric M. Lee; Hongyu Yue

Archive | 2011

Ultraviolet treatment apparatus

Hongyu Yue; Junjun Liu; Jacques Faguet; Dorel I. Toma

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Collaboration

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Dorel I. Toma

Tokyo Electron

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Jacques Faguet

Tokyo Electron

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Junjun Liu

University of Texas at Austin

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Eric M. Lee

Tokyo Electron

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Junjun Liu

University of Texas at Austin

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Yusaku Izawa

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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