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Dorel I. Toma

Tokyo Electron

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Publication

Featured researches published by Dorel I. Toma.

Archive | 2005

METHOD AND SYSTEM FOR TREATING A DIELECTRIC FILM

Robert Kevwitch; Brandon Hansen; Dorel I. Toma; Jianhong Zhu

Archive | 2003

Method of passivating of low dielectric materials in wafer processing

Dorel I. Toma; Paul Schilling

Archive | 2004

Structure comprising amorphous carbon film and method of forming thereof

Jeffrey T. Wetzel; David C. Wang; Eric M. Lee; Dorel I. Toma

Archive | 2005

Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system

Eric M. Lee; Dorel I. Toma

Archive | 2005

Treatment of low dielectric constant films using a batch processing system

Eric M. Lee; Dorel I. Toma

Archive | 2005

Plural treatment step process for treating dielectric films

Eric M. Lee; Dorel I. Toma

Archive | 2003

Structure comprising tunable anti-reflective coating and method of forming thereof

Jeffrey T. Wetzel; David C. Wang; Eric M. Lee; Dorel I. Toma

Archive | 2007

Method and system for characterizing porous materials

Jianhong Zhu; Dorel I. Toma

Archive | 2007

Method and system for forming an air gap structure

Dorel I. Toma; Junjun Liu

Archive | 2007

Method for curing a dielectric film

Junjun Liu; Dorel I. Toma; Eric M. Lee

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Eric M. Lee

Tokyo Electron

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Junjun Liu

University of Texas at Austin

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Hongyu Yue

Tokyo Electron

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Jacques Faguet

Tokyo Electron

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Junjun Liu

University of Texas at Austin

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Jianhong Zhu

Tokyo Electron

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David C. Wang

Tokyo Electron

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Jeffrey T. Wetzel

Tokyo Electron

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Kazuhiro Hamamoto

Tokyo Electron

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Yusaku Izawa

Tokyo Electron

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