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Hsiang-Fu Chen

TSMC

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Publication

Featured researches published by Hsiang-Fu Chen.

Archive | 2014

Micro-electro mechanical system (MEMS) structures and methods of forming the same

Chia-Pao Shu; Chia-Ming Hung; Wen-Chuan Tai; Hung-Sen Wang; Hsiang-Fu Chen; Alex Kalnitsky

Archive | 2012

STRUCTURE AND METHOD FOR MOTION SENSOR

Chia-Pao Shu; Wen-Chuan Tai; Chia-Ming Hung; Hsiang-Fu Chen

Archive | 2011

ELECTRICAL BYPASS STRUCTURE FOR MEMS DEVICE

Chia-Ming Hung; Hung-Sen Wang; Hsiang-Fu Chen; Te-Hsi Lee; Alex Kalnitsky; Wen-Chuan Tai; Kuei-Sung Chang; Yi Heng Tsai

Archive | 2012

Micro-electro mechanical systems (MEMS) having outgasing prevention structures and methods of forming the same

Chia-Pao Shu; Chia-Ming Hung; Wen-Chuan Tai; Hung-Sen Wang; Hsiang-Fu Chen; Alex Kalnitsky

Archive | 2017

MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES AT DIFFERENT PRESSURES

Hsin-Ting Huang; Hsiang-Fu Chen; Wen-Chuan Tai; Shao-Chi Yu; Chia-Ming Hung; Allen Timothy Chang; Bruce C. S. Chou; Chin-min Lin

Archive | 2016

STRUCTURE AND METHOD TO MITIGATE SOLDERING OFFSET FOR WAFER-LEVEL CHIP SCALE PACKAGE (WLCSP) APPLICATIONS

Shao-Chi Yu; Chia-Ming Hung; Hsin-Ting Huang; Hsiang-Fu Chen; Allen Timothy Chang; Wen-Chuan Tai

Archive | 2016

MONOLITHIC MEMS PLATFORM FOR INTEGRATED PRESSURE, TEMPERATURE, AND GAS SENSOR

Shao-Chi Yu; Chia-Ming Hung; Hsin-Ting Huang; Hsiang-Fu Chen; Wen-Chuan Tai

Archive | 2016

High Vacuum Sealing for Sensor Platform Process

Chia-Ming Hung; Shao-Chi Yu; Hsiang-Fu Chen; Wen-Chuan Tai; Hsin-Ting Huang

Archive | 2016

THIN FILM STRUCTURE FOR HERMETIC SEALING

Shao-Chi Yu; Hsiang-Fu Chen; Hsin-Ting Huang; Chia-Ming Hung; Wen-Chuan Tai

Archive | 2014

Microelectrochemical systems (MEMS) device having a seal layer arranged over or lining a hole in fluid communication with a cavity of the MEMS device

Chia-Ming Hung; Shao-Chi Yu; Hsiang-Fu Chen; Wen-Chuan Tai; Hsin-Ting Huang

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Collaboration

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Chia-Ming Hung

TSMC

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Wen-Chuan Tai

TSMC

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Hsin-Ting Huang

TSMC

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Shao-Chi Yu

TSMC

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Alex Kalnitsky

TSMC

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Chia-Pao Shu

TSMC

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Hung-Sen Wang

TSMC

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Allen Timothy Chang

TSMC

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Bruce C. S. Chou

TSMC

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Chin-min Lin

TSMC

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