Hyeog-Ki Kim

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Apparatus and method for improved wafer transport ambient

Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same

Dustproof smock for use in a clean room, fabric for use in manufacturing the smock, and method of manufacturing the fabric

WAFER HOLDING APPARATUS

Dustproof fabric worn in a clean room

Substrate processing apparatus used in manufacture of e.g. semiconductor wafer, has gas circulating tube extended outside substrate transfer chamber and connected to corresponding portions of substrate transfer chamber

Substratverarbeitungsgerät und Verfahren zum Verarbeiten eines Substrats unter Steuerung der Kontaminierung in einem Substrattransfermodul

Substratverarbeitungsgerät und Verfahren zum Verarbeiten eines Substrats unter Steuerung der Kontaminierung in einem Substrattransfermodul A substrate processing apparatus and method for processing a substrate under the control of contamination in a substrate transfer module

Dustproof garment for clean room