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Hyeog-Ki Kim

Samsung

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Publication

Featured researches published by Hyeog-Ki Kim.

Archive | 2003

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Yo-han Ahn; Ki-Doo Suwon Kim; Soo-Woong Lee; Jung-Sung Hwang; Hyeog-Ki Kim

Archive | 2004

Apparatus and method for improved wafer transport ambient

Hyeog-Ki Kim; Kun-hyung Lee; Ok-sun Lee; Ki-Doo Suwon Kim; Chang-Min Cho

Archive | 2011

Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same

Byung-Koog Ra; Tae-Sik Yun; Kun-hyung Lee; Hyun-joon Kim; Hyeog-Ki Kim; Ki-Doo Suwon Kim

Archive | 1999

Dustproof smock for use in a clean room, fabric for use in manufacturing the smock, and method of manufacturing the fabric

Chang-su Lim; Hyeog-Ki Kim; Sue-ryeon Kim; Il-kyoung Kim

Archive | 2013

WAFER HOLDING APPARATUS

Hyun-Ho Suwon Cho; Hyeog-Ki Kim; Kwang-shin Lim

Archive | 1998

Dustproof fabric worn in a clean room

Chang-su Lim; Hyeog-Ki Kim; Sue-ryeon Kim; Il-kyoung Kim

Archive | 2003

Substrate processing apparatus used in manufacture of e.g. semiconductor wafer, has gas circulating tube extended outside substrate transfer chamber and connected to corresponding portions of substrate transfer chamber

Yo-han Ahn; Jung-sung Suwon Hwang; Hyeog-Ki Kim; Ki-Doo Suwon Kim; Soo-Woong Lee

Archive | 2003

Substratverarbeitungsgerät und Verfahren zum Verarbeiten eines Substrats unter Steuerung der Kontaminierung in einem Substrattransfermodul

Yo-han Ahn; Jung-sung Suwon Hwang; Hyeog-Ki Kim; Ki-Doo Suwon Kim; Soo-Woong Lee

Archive | 2003

Substratverarbeitungsgerät und Verfahren zum Verarbeiten eines Substrats unter Steuerung der Kontaminierung in einem Substrattransfermodul A substrate processing apparatus and method for processing a substrate under the control of contamination in a substrate transfer module

Yo-han Ahn; Jung-sung Suwon Hwang; Hyeog-Ki Kim; Ki-Doo Suwon Kim; Soo-Woong Lee

Archive | 1998

Dustproof garment for clean room

Youn-soo Han; Hyeog-Ki Kim; Hyun-joon Kim; Seung-Uhn Kim; 承彦 金; 賢俊 金; 赫其 金; 允洙 韓

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Collaboration

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Ki-Doo Suwon Kim

Samsung

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Chang-su Lim

Samsung

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Il-kyoung Kim

Samsung

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Soo-Woong Lee

Samsung

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Sue-ryeon Kim

Samsung

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Yo-han Ahn

Samsung

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Jung-sung Suwon Hwang

Samsung

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Hyun-joon Kim

Samsung

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Kun-hyung Lee

Samsung

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Byung-Koog Ra

Samsung

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