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Ichiju Satoh

Ebara Corporation

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Publication

Featured researches published by Ichiju Satoh.

Archive | 2000

Polishing apparatus including attitude controller for turntable and/or wafer carrier

Ichiju Satoh; Norio Kimura; Katsuya Okumura

Archive | 1998

Stage positioning device

Katsuhide Watanabe; Ichiju Satoh; Takahide Haga; Yoshinori Jouno

Archive | 1998

Damper device and turbomolecular pump with damper device

Chikara Murakami; Ichiju Satoh

Archive | 2000

Polishing apparatus including attitude controller for dressing apparatus

Ichiju Satoh; Norio Kimura

Archive | 2004

Vibration isolation system for a vacuum chamber

Ichiju Satoh; Setsuji Shinoda; Yoshinori Jono; Tsutomu Nishihashi

Ieej Transactions on Industry Applications | 1999

A Magnetic Damper Based on Magnetic See-Saw Principles and Its Analysis Using Bessel Function

Chikara Murakami; Ichiju Satoh

Archive | 2000

Polishing apparatus including attitude controller for wafer carrier and turntable

Norio Kimura; Katsuya Okumura; Ichiju Satoh

Archive | 1998

Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung

Chikara Murakami; Ichiju Satoh

Archive | 2000

Polishing means including a setting control for a puller

Norio Fujisawa-shi Kimura; Ichiju Satoh

Archive | 2000

Polisher including setting control for a turntable and / or platelets carrier

Ichiju Satoh; Norio Kimura; Katsuya Okumura

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Collaboration

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Norio Kimura

Ebara Corporation

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Katsuya Okumura

University of Tokyo

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Chikara Murakami

National Aerospace Laboratory

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Atsushi Nakajima

Japan Aerospace Exploration Agency

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Chikara Murakami

National Aerospace Laboratory

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Jinzo Nagahiro

Tokyo Denki University

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Katsuhide Watanabe

National Aerospace Laboratory

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Setsuji Shinoda

Ebara Corporation

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Takahide Haga

Ebara Corporation

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Tsutomu Nishihashi

Ebara Corporation

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