Katsuya Okumura | Researchain

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Archive | 1993

Method and apparatus for polishing a workpiece

Katsuya Okumura; Tohru Intellectual Pr Watanabe; Riichirou Aoki; Hiroyuki Yano; Masako Kodera; Atsushi Shigeta; You Ishii; Norio Kimura; Masayoshi Hirose; Yukio Ikeda

Archive | 1990

Evacuation apparatus and evacuation method

Katsuya Okumura; Fumio Kuriyama; Yukio Murai; Manabu Tsujimura; Hiroshi Sobukawa

Archive | 1995

Method and apparatus for evacuating vacuum system

Katsuya Okumura; Yuuichi Mikata; Manabu Tsujimura; Yoshio Ando

Archive | 1989

Turbomolecular pump and method of operating the same

Katsuya Okumura; Fumio Kuriyama; Yukio Murai; Manabu Tsujimura; Hiroshi Sobukawa

Archive | 2000

Polishing apparatus including attitude controller for turntable and/or wafer carrier

Ichiju Satoh; Norio Kimura; Katsuya Okumura

Archive | 1996

Apparatus for polishing a wafer

Hiroyuki Yano; Katsuya Okumura; Norio Kimura; Tomoyuki Yahiro; Hozumi Yasuda

Archive | 1995

Revolving drum polishing apparatus

Masayoshi Hirose; Seiji Ishikawa; Norio Kimura; Yoshimi Sasaki; Kouki Yamada; Fujio Aoyama; Noburu Shimizu; Katsuya Okumura

Archive | 2000

Apparatus for plating substrate, method for plating substrate, electrolytic processing method, and apparatus thereof

Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita

Archive | 2012