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J.J. Senkevich

Rensselaer Polytechnic Institute

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Publication

Featured researches published by J.J. Senkevich.

Chemical Vapor Deposition | 2003

Substrate-Independent Palladium Atomic Layer Deposition

J.J. Senkevich; F. Tang; D. Rogers; Jason T. Drotar; C. Jezewski; W. A. Lanford; G.-C. Wang; T.-M. Lu

Archive | 2003

Atomic layer deposition of noble metals

J.J. Senkevich; Toh-Ming Lu

Archive | 2002

Atomic layer passivation

J.J. Senkevich; Toh-Ming Lu; G.-R. Yang

Archive | 2006

Molecular caulk: a pore sealant for ultra-low k dielectrics

J.J. Senkevich; Toh-Ming Lu

Chemical Vapor Deposition | 2004

Selective Deposition of Ultrathin Poly(p‐xylene) Films on Dielectrics Versus Copper Surfaces

J.J. Senkevich; Christopher J. Wiegand; G.-R. Yang; T.-M. Lu

Archive | 2005

Surface modification of CVD polymer films

J.J. Senkevich; Toh-Ming Lu; G.-R. Yang

Chemical Vapor Deposition | 2002

Phosphorus Atomic Layers Promoting the Chemisorption of Highly Polarizable Transition Metallorganics

J.J. Senkevich; G.-R. Yang; T.-M. Lu; Timothy S. Cale; C. Jezewski; W. A. Lanford

Applied Physics A | 2004

Substrate-independent sulfur-activated dielectric and barrier-layer surfaces to promote the chemisorption of highly polarizable metallorganics

J.J. Senkevich; G.-R. Yang; F. Tang; G.-C. Wang; T.-M. Lu; Timothy S. Cale; C. Jezewski; W. A. Lanford

Applied Physics A | 2003

Compositional control of plasma enhanced chemical vapor deposited diamond-like carbon/SiO2 nanocomposite thin films

J.J. Senkevich; G.-R. Yang; T.-M. Lu; D.W. Sherrer

Archive | 2004

Stress Reduction in Sputter Deposited Thin Films Using Physically Self-Assembled Nanostructures as Compliant Layers

Tansel Karabacak; J.J. Senkevich; G.-C. Wang; Toh-Ming Lu

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G.-R. Yang

Rensselaer Polytechnic Institute

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Toh-Ming Lu

Rensselaer Polytechnic Institute

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T.-M. Lu

Rensselaer Polytechnic Institute

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G.-C. Wang

Rensselaer Polytechnic Institute

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F. Tang

Rensselaer Polytechnic Institute

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Timothy S. Cale

Rensselaer Polytechnic Institute

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Christopher J. Wiegand

Rensselaer Polytechnic Institute

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D. Rogers

Rensselaer Polytechnic Institute

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Jason T. Drotar

Rensselaer Polytechnic Institute

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Tansel Karabacak

University of Arkansas at Little Rock

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