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Dive into the research topics where J. Joseph Armstrong is active.

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Featured researches published by J. Joseph Armstrong.


Current Developments in Lens Design and Optical Engineering V | 2004

Small catadioptric microscope optics

David R. Shafer; Yung-Ho Chuang; J. Joseph Armstrong

New catadioptric objectives have been developed with large bandwidths in the DUV, high numerical apertures (NAs), and small size. This can be achieved using a single glass material. Designs are specifically optimized for loose alignment tolerances and ease of manufacturability. Applications include broad band DUV imaging and high resolution immersion imaging for industrial microscopy and life sciences.


Archive | 1998

System and method for analyzing topological features on a surface

Yung-Ho Chuang; J. Joseph Armstrong; David L. Brown; Jason Z. Lin; Bin-Ming Benjamin Tsai


Archive | 2006

Excimer laser inspection system

Bin-Ming Benjamin Tsai; Yung-Ho Chuang; J. Joseph Armstrong; David L. Brown


Archive | 2006

High NA system for multiple mode imaging

Yung-Ho Chuang; David R. Shafer; Bin-Ming B Tsai; J. Joseph Armstrong


Archive | 1999

Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

David R. Shafer; Young-ho Chuang; J. Joseph Armstrong


Archive | 2003

Inspection system using small catadioptric objective

Yung-Ho Chuang; J. Joseph Armstrong; David R. Shafer


Archive | 2004

Peak power and speckle contrast reduction for a single layer pulse

Yung-Ho Chuang; J. Joseph Armstrong


Archive | 2006

Beam delivery system for laser dark-field illumination in a catadioptric optical system

Yung-Ho Chuang; J. Joseph Armstrong


Archive | 2009

Split field inspection system using small catadioptric objectives

J. Joseph Armstrong; Yung-Ho Chuang


Archive | 2013

Solid-state laser and inspection system using 193nm laser

Yung-Ho Alex Chuang; J. Joseph Armstrong; Vladimir Dribinski

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