Jack W. Judy

Microelectromechanical systems (MEMS): fabrication, design and applications

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond. (Some figures in this article are in colour only in the electronic version)

Magnetically actuated, addressable microstructures

Surface-micromachined, batch-fabricated structures that combine plated-nickel films with polysilicon mechanical flexures to produce individually addressable, magnetically activated devices have been fabricated and tested. Individual microactuator control has been achieved in two ways: (1) by actuating devices using the magnetic field generated by coils integrated around each device and (2) by using electrostatic forces to clamp selected devices to an insulated ground plane while unclamped devices are freely moved through large out-of-plane excursions by an off-chip magnetic field. The present application for these structures is as micromirrors for microphotonic systems where they can be used either for selection from an array of mirrors or else individually for switching among fiber paths.

Magnetic microactuation of polysilicon flexure structures

A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment. A microactuator consisting of a 400/spl times/(47-40)/spl times/7 /spl mu/m/sup 3/ rectangular plate of NiFe attached to a 400/spl times/(0.9-1.4)/spl times/2.25 /spl mu/m/sup 3/ polysilicon cantilever beam has been displaced over 1.2 mm, rotated over 180/spl deg/, and actuated with over 0.185 nNm of torque. The microactuator is capable of motion both in and out of the wafer plane and has been operated in a conductive fluid environment. Theoretical expressions for the displacement and torque are developed and compared to experimental results.

Magnetic microactuation of torsional polysilicon structures

Abstract A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 μ m × 130 μ m × 15 μ m nickel-iron plate attached to a pair of 400 μ m × 2.2 μ m × 2.2 μ m polysilicon torsional beams has been rotated more than 90° out of the plane of the wafer and actuated with a torque greater than 3.0 nN m. The torsional flexure structure constrains motion to rotation about a single axis, which can be an advantage for a number of microphonic applications (e.g., beam chopping, scanning, and steering).

Magnetic nanoparticle-mediated massively parallel mechanical modulation of single-cell behavior

We report a technique for generating controllable, time-varying and localizable forces on arrays of cells in a massively parallel fashion. To achieve this, we grow magnetic nanoparticle–dosed cells in defined patterns on micromagnetic substrates. By manipulating and coalescing nanoparticles within cells, we apply localized nanoparticle-mediated forces approaching cellular yield tensions on the cortex of HeLa cells. We observed highly coordinated responses in cellular behavior, including the p21-activated kinase–dependent generation of active, leading edge–type filopodia and biasing of the metaphase plate during mitosis. The large sample size and rapid sample generation inherent to this approach allow the analysis of cells at an unprecedented rate: in a single experiment, potentially tens of thousands of cells can be stimulated for high statistical accuracy in measurements. This technique shows promise as a tool for both cell analysis and control.

Design and fabrication of a micromachined planar patch-clamp substrate with integrated microfluidics for single-cell measurements

We have designed, fabricated, tested, and integrated microfabricated planar patch-clamp substrates and poly(dimethylsiloxane) (PDMS) microfluidic components. Substrates with cell-patch-site aperture diameters ranging from 300nm to 12 /spl mu/m were produced using standard MEMS-fabrication techniques. The resistance of the cell-patch sites and substrate capacitance were measured using impedance spectroscopy. The resistance of the microfabricated apertures ranged from 200 k/spl Omega/ to 47 M/spl Omega/ for apertures ranging from 12 /spl mu/m to 750 nm, respectively. The substrate capacitance was 17.2 pF per mm/sup 2/ of fluid contact area for substrates with a 2-/spl mu/m-thick layer of silicon dioxide. In addition, the ability of the planar patch-clamp substrates to form high-resistance seals in excess of 1 G/spl Omega/ has been confirmed using Chinese hamster ovary cells (CHO-K1). Testing shows that the microfluidic components are appropriate for driving human embryonic kidney cells (HEK 293) to patch apertures, for trapping cells on patch apertures, and for exchanging the extracellular fluid environment.

Technology-Aware Algorithm Design for Neural Spike Detection, Feature Extraction, and Dimensionality Reduction

Applications such as brain-machine interfaces require hardware spike sorting in order to 1) obtain single-unit activity and 2) perform data reduction for wireless data transmission. Such systems must be low-power, low-area, high-accuracy, automatic, and able to operate in real time. Several detection, feature-extraction, and dimensionality-reduction algorithms for spike sorting are described and evaluated in terms of accuracy versus complexity. The nonlinear energy operator is chosen as the optimal spike-detection algorithm, being most robust over noise and relatively simple. Discrete derivatives is chosen as the optimal feature-extraction method, maintaining high accuracy across signal-to-noise ratios with a complexity orders of magnitude less than that of traditional methods such as principal-component analysis. We introduce the maximum-difference algorithm, which is shown to be the best dimensionality-reduction method for hardware spike sorting.

Ferromagnetic micromechanical magnetometer

A novel micromechanical magnetometer has been designed, fabricated, and tested that consists of low-stress electrodeposited hard magnetic alloys and surface micromachined polysilicon structures. The sensor responds to applied magnetic fields without consuming any power and the magnitude of the response is scale independent. By optically measuring their response, these second-generation sensors can be used to detect fields as small as 500 nT and their experimental performance agree well with theoretical predictions.

Comparison of spike-sorting algorithms for future hardware implementation

Applications such as brain-machine interfaces require hardware spike sorting in order to (1) obtain single-unit activity and (2) perform data reduction for wireless transmission of data. Such systems must be low-power, low-area, high-accuracy, automatic, and able to operate in real time. Several detection and feature extraction algorithms for spike sorting are described briefly and evaluated in terms of accuracy versus computational complexity. The nonlinear energy operator method is chosen as the optimal spike detection algorithm, being most robust over noise and relatively simple. The discrete derivatives method [1] is chosen as the optimal feature extraction method, maintaining high accuracy across SNRs with a complexity orders of magnitude less than that of traditional methods such as PCA.

Multielectrode microprobes for deep-brain stimulation fabricated with a customizable 3-D electroplating process

Although deep-brain stimulation (DBS) can be used to improve some of the severe symptoms of Parkinsons disease (e.g., Bradykinesia, rigidity, and tremors), the mechanisms by which the symptoms are eliminated are not well understood. Moreover, DBS does not prevent neurodegeneration that leads to dementia or death. In order to fully investigate DBS and to optimize its use, a comprehensive long-term stimulation study in an animal model is needed. However, since the brain region that must be stimulated, known as the subthalamic nucleus (STN), is extremely small (500 /spl mu/m/spl times/500 /spl mu/m/spl times/1 mm) and deep within the rat brain (10 mm), the stimulating probe must have geometric and mechanical properties that allow accurate positioning in the brain, while minimizing tissue damage. We have designed, fabricated, and tested a novel micromachined probe that is able to accurately stimulate the STN. The probe is designed to minimize damage to the surrounding tissue. The probe shank is coated with gold and the electrode interconnects are insulated with silicon nitride for biocompatibility. The probe has four platinum electrodes to provide a variety of spatially distributed stimuli, and is formed in a novel 3-D plating process that results in a microwire like geometry (i.e., smoothly tapering diameter) with a corresponding mechanically stable shank.