Jacob Thaysen

Environmental sensors based on micromachined cantilevers with integrated read-out

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water.

A microcantilever-based alcohol vapor sensor-application and response model

A recently developed microcantilever probe with integrated piezoresistive readout has been applied as a gas sensor. Resistors, sensitive to stress changes, are integrated on the flexible cantilevers. This makes it possible to monitor the cantilever deflection electrically and with an integrated reference cantilever background noise is subtracted directly in the measurement. A polymer coated cantilever has been exposed to vapors of various alcohols and the resulting cantilever response has been interpreted using a simple evaporation model. The model indicates that the cantilever response is a direct measure of the molecular concentration of alcohol vapor. On the basis of the model the detection limit of this cantilever-based sensor is determined to be below 10 ppm for alcohol vapor measurements. Furthermore, the time response of the cantilever can be used to distinguish between different alcohols due to a difference in the evaporation rates.

Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement

Abstract We have developed a new generic platform for the fabrication of multipurpose microprobes with integrated piezoresistive read-out, built-in background filter and silicon tip. The probe fabrication is based on SOI wafers with buried boron etch-stop layers, which allow us to realize probes with fully encapsulated resistors and integrated silicon tips. The dimensions of the resistors are well defined and leak-current is eliminated. Probes with a force constant in the range of 0.8–4 N/m and with resonant frequencies in the range of 40–80 kHz have been fabricated. The probes typically display a deflection sensitivity of (ΔR/R)z−1=2.4×10−7 A−1, and a force sensitivity (ΔR/R)F−1=2.7×10−6 nN−1. The change in resistance of the piezoresistors is detected by a highly symmetrical on-chip Wheatstone bridge arrangement. The measured noise level in the Wheatstone bridge is in good agreement with the calculated noise limit and a minimum detectable cantilever deflection of 0.3 A has been predicted for a measurement bandwidth of 10 Hz. The symmetrical bridge configuration has been compared with a nonsymmetrical setup, and it is concluded that the symmetrical Wheatstone bridge significantly decreases nonlinearities in the output response. Finally, the probe has successfully been used for atomic force microscopy (AFM) imaging.

Optimised cantilever biosensor with piezoresistive read-out

We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which-in contrast to conventional metal wiring-is compatible with the high-temperature LPCVD coating process.

Optimization of sensitivity and noise in piezoresistive cantilevers

In this article, the sensitivity and the noise of piezoresistive cantilevers were systematically investigated with respect to the piezoresistor geometry, the piezoresistive materials, the doping dose, the annealing temperature, and the operating biased voltage. With the noise optimization results, dimension optimized array cantilevers were designed and fabricated by using single-crystal silicon, low-pressure chemical-vapor deposition (LPCVD) amorphous silicon and microcrystalline silicon as piezoresistive layers. Measurement results have shown that the smallest Hooge factor (α) was 3.2×10−6, the biggest gauge factors was 95, and the minimum detectable deflection (MDD) at 6 V and 200 Hz-measurement bandwidth was 0.3 nm for a single-crystal silicon cantilever. Of the two LPCVD silicon piezoresistive cantilevers, amorphous silicon piezoresistors had relatively lower 1/f noise. The MDD for a LPCVD silicon cantilever at a 200 Hz-measurement bandwidth was 0.4 nm. For all kinds of piezoresistive cantilevers, the...

Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors

Immobilised DNA-oligo layers are scientifically and technologically appealing for a wide range of sensor applications such as DNA chips. Using microcantilever-based sensors with integrated readout, we demonstrate in situ quantitative studies of surface-stress formation during self-assembly of a 25-mer thiol-modified DNA-oligo layer. The self-assembly induces a surface-stress change, which closely follows Langmuir adsorption model. The adsorption results in compressive surface-stress formation, which might be due to intermolecular repulsive forces in the oligo layer. The rate constant of the adsorption depends on the concentration of the oligo solution. Based on the calculated rate constants a surface free energy of the thiol-modified DNA-oligo adsorption on gold is found to be -32.4 kJ mol(-1). The adsorption experiments also indicate that first a single layer of DNA-oligos is assembled on the gold surface after which a significant unspecific adsorption takes place on top of the first DNA-oligo layer. The cantilever-based sensor principle has a wide range of applications in real-time local monitoring of chemical and biological interactions as well as in the detection of specific DNA sequences, proteins and particles.

Polymer-based stress sensor with integrated readout

We present a polymer-based mechanical sensor with an integrated strain sensor element. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in the sensor. By using the fact that the polymer SU-8 [1] is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8-based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. First, the surface stress sensing principle is discussed, from which it can be shown that the SU-8-based sensor is nearly as sensitive as the silicon based mechanical sensor. We hereafter demonstrate the chip fabrication technology of such a sensor, which includes multiple SU-8 and gold layer deposition. The SU-8-based mechanical sensor is finally characterized with respect to sensitivity, noise and device failure. The characterization shows that there is a good agreement between the expected and the obtained performance.

Modular design of AFM probe with sputtered silicon tip

We present an atomic force microscopy (AFM) probe with integrated piezoresistive read-out. The probe consists of a micromachined cantilever with a tip at the end. The cantilever is a multilayer structure with its thickness defined by etch-stop and the bending controlled by fitting the thicknesses of the thin films constituting the cantilever. The AFM probe has an integrated tip made of a thick sputtered silicon layer, which is deposited after the probe has been defined and just before the cantilevers are released. The tips are so-called rocket tips made by reactive ion etching. We present probes with polysilicon resistors for demonstrating the fabrication principle. The probes have been characterised with respect to noise and deflection sensitivity and have been applied in AFM imaging.

A cantilever-based sensor for thermal cycling in buffer solution

A cantilever-based sensor for monitoring temperature-controlled biochemical reactions in buffer solution has been fabricated. The sensor comprises two cantilevers with integrated piezoresistive read-out enclosed in a reaction chamber of 50 µl volume. The output voltage from the sensor has been recorded during multiple temperature cycles between 20 and 70 °C and during polymerase chain reaction-like (PCR-like) temperature cycles in a buffer solution. The output voltage of the sensor is reproducible from cycle to cycle and is proportional to the temperature. Furthermore, the sensor signal stabilises immediately at the temperature plateaus. Thus, the developed device is a promising tool for monitoring PCR-like reactions on-line.

A Microcantilever-Based Detection Principle for µTAS

We present a new cantilever-based bio-chemical sensor integrated into a microliquid handling system. The cantilevers have integrated piezoresistive readout, which enables simple measurements on even non-transparent liquids. The chip design consists of 10 cantilevers inserted in a channel. The chip has been used for in-situ online monitoring of the etching of a metal film and the immobilization of molecules with sub-monolayer resolution.